| 20090233113 | ALUMINUM MEMBER OR ALUMINUM ALLOY MEMBER WITH EXCELLENT CORROSION RESISTANCE - To provide an aluminum alloy or aluminum member having an anodic oxide coating formed thereon, the coating having excellent resistance to gaseous corrosion and resistance to plasma and excellent adhesion, and a member for a vacuum apparatus formed of such an aluminum alloy or aluminum member having excellent corrosion resistance. Moreover, a member having a sufficient voltage resistance is provided to stably keep a plasma state in a process using plasma. | 09-17-2009 |
