JSR Corportion
JSR Corportion Patent applications | ||
Patent application number | Title | Published |
---|---|---|
20120282550 | RADIATION-SENSITIVE COMPOSITION - A radiation-sensitive composition includes a polymer composition and a radiation-sensitive acid generator. The polymer composition includes a first polymer and a second polymer. The first polymer includes a repeating unit shown by a following formula (1). The second polymer includes a repeating unit shown by a following formula (2) and does not include a repeating unit shown by the formula (1). | 11-08-2012 |