| 20100304035 | Plasma Spraying and Recrystallization of Thick Film Layer - A linear process tool comprising at least two deposition modules each comprising one or more plasma spray guns operable to move in a direction approximately orthogonal to the direction of a substrate carrier is configured to deposit at least a first and second layer, in direct contact with each other, wherein a first layer is of first composition and the second layer is of second composition different than the first composition. | 12-02-2010 |
