Institute of Microelectronics Chinese Academy of Science Patent applications |
Patent application number | Title | Published |
20150187942 | SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME - The present invention discloses a semiconductor structure and a method for manufacturing the same, which comprises providing a substrate, and forming a stress layer, a buried oxide layer, and an SOI layer on the substrate; forming a doped region of the stress layer arranged in a specific position in the stress layer; forming an oxide layer and a nitride layer on the SOI layer, and forming a first trench that etches the nitride layer, the oxide layer, the SOI layer, and the buried oxide layer, and stops on the upper surface of the stress layer, and exposes at least part of the doped region of the stress layer; forming a cavity by wet etching through the first trench to remove the doped region of the stress layer; forming a polycrystalline silicon region of the stress layer and a second trench by filling the cavity with polycrystalline silicon and etching back; forming an isolation region by filling the second trench. The semiconductor structure and the method for manufacturing the same disclosed in the present invention provide a favorable stress for the channel of the semiconductor device by introducing a stress layer and a stress induced zone set at specific positions depending on device type to help improving the performance of the semiconductor device. | 07-02-2015 |
20130037821 | Semiconductor Device and Manufacturing Method thereof - The present invention provides a semiconductor device, comprising: a substrate; shallow trench isolations embedded into the substrate and forming at least one opening area; a channel region located in the opening area; a gate stack comprising a gate dielectric layer and a gate electrode layer and located above the channel region; source/drain regions located at both sides of the channel region and comprising a stress layer that provides a strain to the channel region; wherein, there is a liner layer between the shallow trench isolation and the stress layer, which serves as the seed layer of the stress layer. A liner layer that is of the same or similar material as the stress layer in the source/drain region is inserted between the STI and the stress layer of the source/drain region as a seed layer or nucleation layer for the epitaxial growth, thereby eliminating the STI edge effect during the source/drain strain engineering, i.e. eliminating the gap between the STI and the stress layer of the source/drain region, as a result, the reduction of the channel stress produced by the source/drain strain is prevented, the carrier mobility of the MOS device is increased and the driving capability of the device is enhanced. | 02-14-2013 |
20120273901 | SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - The present invention relates to a semiconductor device and a method for manufacturing the same. According to the present invention, when a gate is formed via a replacement gate process, a portion of a work function metal layer and a portion of a first metal layer are removed after the work function metal layer and the first metal layer are formed, and then the removed portions are replaced with a second metal layer. A device having such a gate structure greatly reduces the resistivity of the whole gate, due to a portion of the work function metal layer with a high resistivity being removed and the removed portion being filled with the second metal layer with a low resistivity, thereby AC performances of the device are improved. | 11-01-2012 |
20120191392 | METHOD FOR ANALYZING CORRELATIONS AMONG DEVICE ELECTRICAL CHARACTERISTICS AND METHOD FOR OPTIMIZING DEVICE STRUCTURE - A method for analyzing correlations among electrical characteristics of an electronic device and a method for optimizing a structure of the electronic device are disclosed. The electronic device may comprises a plurality of electrical characteristics v | 07-26-2012 |