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INSTITUT FUER AKUSTOMIKROSKOPIE DR. KRAEMER GMBH

INSTITUT FUER AKUSTOMIKROSKOPIE DR. KRAEMER GMBH Patent applications
Patent application numberTitlePublished
20110061465METHOD AND APPARATUS FOR NON-DESTRUCTIVE DETECTION OF DEFECTS IN THE INTERIOR OF SEMICONDUCTOR MATERIAL - A method and an apparatus for the non-destructive detection of defects in the interior of semiconductor material (03-17-2011