Infineon Technologes AG
Infineon Technologes AG Patent applications | ||
Patent application number | Title | Published |
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20130200786 | Plasma Cell and Method of Manufacturing a Plasma Cell - A plasma cell and a method for making a plasma cell are disclosed. In accordance with an embodiment of the present invention, a cell comprises a semiconductor material, an opening disposed in the semiconductor material, a dielectric layer lining a surface of the opening, a cap layer closing the opening, a first electrode disposed adjacent the opening, and a second electrode disposed adjacent the opening. | 08-08-2013 |