| 20110053094 | METHOD FOR FABRICATING ROLLER MOLD FOR NANOIMPRINTING - A method for fabricating a roller mold is provided, including providing a roller substrate, wherein the roller substrate is a cylinder and has a curved surface. An inorganic resist layer is formed over the curved surface of the roller substrate. A laser exposure device is provided for irradiating the inorganic resist layer with a focused laser, causing phase change of the inorganic resist layer at exposed regions. The inorganic resist layer in the exposed regions is removed to form a nano-pattern over the roller substrate. | 03-03-2011 |
