| HORIBA, LTD. Patent applications |
| Patent application number | Title | Published |
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| 20120125080 | EXHAUST GAS SAMPLING AND ANALYSIS SYSTEM - An exhaust gas sampling and analysis system includes a main flow channel in which a flow restriction mechanism and a first suction pump are arranged; a measurement flow channel in which an exhaust gas analysis device is provided and that extends from the main flow channel at a position downstream of the flow restriction mechanism; and a compensation flow channel in which a flow rate adjustment mechanism is provided and that extends from the main flow channel at a position downstream of the point from which the measurement flow channel extends. The first suction pump further reduces the pressure of the exhaust gas. The flow rate adjustment mechanism adjusts, in order that the pressure of the exhaust gas at the point from which the measurement flow channel extends is a predetermined value, the flow rate of the compensation gas. | 05-24-2012 |
| 20120090377 | SYSTEM FOR DETERMINING NUMBER OF PARTICLES - Provided is a system for determining a number of particles, which has a simplified and compact structure as well as a reduced cost. The system comprises a diluter (PND | 04-19-2012 |
| 20120045375 | BODY FLUID ANALYSIS FIXTURE - The present invention is intended to, in a configuration in which a liquid container for analysis sealed by a sealing member is penetrated by a penetrating member, prevent the sealing member from being unexpectedly broken to leak a liquid for analysis. Also, the present invention has: a container holder part that holds a liquid container for analysis; a penetrating member that penetrates a sealing member of the liquid container for analysis; a first moving mechanism that enables the penetrating member to be moved between a hole making position and a receding position; and a second moving mechanism that enables the penetrating member moved to the hole making position by the first moving mechanism to be moved toward the sealing member to a penetrating position where the penetrating member penetrates the sealing member. | 02-23-2012 |
| 20120043202 | CELL ANALYSIS CARTRIDGE - Not only a downsized cartridge but also an aperture constituted simply and at low cost using a downsized configuration of the cartridge is provided. A measurement channel includes a front-surface-side channel unit provided on a front surface of a cartridge main body; a rear-surface-side channel unit provided on a rear surface of the cartridge main body; and a connection channel unit connecting the front-surface-side channel unit to the rear-surface-side channel unit. An aperture is formed in the connection channel unit, a fluid contact unit of one electrode is arranged in the front-surface-side channel unit, and a fluid contact unit of the other electrode is arranged in the rear-surface-side channel unit. | 02-23-2012 |
| 20120033219 | PROBE FOR GAS ANALYSIS - A probe for gas analysis is provided in a pipe through which sample gas flows. The probe includes a tubular member and one or more sample gas inflow portions. The tubular member is disposed to cross a flow of the sample gas, and includes a measurement field to which the sample gas is introduced. The one or more sample gas inflow portions are provided in the tubular member. The sample gas flows around, and flows into the measurement field through the one or more sample gas inflow portions. | 02-09-2012 |
| 20120033218 | AIR-DRIVEN SHUTTER DEVICE AND OPTICAL ANALYZER - An air-driven shutter device is used in an optical analyzer. The optical analyzer includes a measurement field to which a sample is supplied, a light-emitting unit measurement field for emitting measuring light to the sample, a light-receptive unit for receiving the measuring light that has passed through the sample, and a purge air supplying unit for supplying purge air. The air-driven shutter device includes a shutter and a shutter opening and closing mechanism. The shutter is disposed between the light-emitting unit and/or the light-receptive unit and the measurement field. The shutter opening and closing mechanism keeps the shutter open with pressure of the gas supplied from the purge air supplying unit, and closes the shutter when the pressure of the gas supplied from the purge air supplying unit becomes lower than a predetermined level. | 02-09-2012 |
| 20120017666 | EXHAUST GAS ANALYZING SYSTEM - In a gas analyzer | 01-26-2012 |
| 20110317166 | OPTICAL MEASUREMENT DEVICE - An optical measurement device is adapted to measure characteristics of a measurement targeted fluid based on a transmitted inspection light. The device comprises a cell having an internal space for accommodating the measurement targeted fluid to flow therein and having a pair of opposing through holes for transmitting the inspection light, each of the through holes sealed with a transparent member. The device includes a projection optical system member having a port for projecting the inspection light and a light-receiving optical system member having a port for receiving the inspection light transmitted through the internal space. A base member is provided for supporting the cell, the projection optical system member, and the light-receiving optical system member in a configuration with gaps between the cell and the respective optical system members to accommodate movement in a predetermined range along a direction perpendicular to an optical axis of the inspection light. | 12-29-2011 |
| 20110308295 | AUTOMATIC TORQUE CALIBRATION DEVICE - The present invention provides an easy-of-use torque calibration device capable of improving workability and safety and attaining reduction in time of a torque calibration in calibrating a torque of a dynamometer. That is, the present invention includes a connecting shaft coaxially connected to a torque measurement rotor, a calibration arm integrally rotated with the connecting shaft, a plurality of calibration weights for applying loads to both ends of the calibration arm, a moving mechanism to move the connecting shaft between a connection position and a spaced position, and a rotating direction fixing mechanism for fixing the torque measurement rotor and the connecting shaft in the rotating direction at the connection position, and a control unit controlling the moving mechanism. | 12-22-2011 |
| 20110299083 | SAMPLE ANALYZING APPARATUS - Provided is a sample analyzing apparatus by which highly accurate measurement results can be obtained. The sample analyzing apparatus is provided with: a sample cell part constituting a plurality of cell spaces; light source parts that irradiate light in wavelength regions different from each other on the cell spaces; a plurality of collimator mirrors that are arranged to correspond to the cell spaces respectively and that collimate the transmitted light that has passed through the cell spaces; a diffraction grating that disperses the reflection light collimated by the collimator mirrors; a light collecting mirror that collects the light dispersed by means of the diffraction grating; and a light detector that detects the light collected by the light collecting mirror. | 12-08-2011 |
| 20110299067 | OPTICAL MEASUREMENT CELL - To make it possible to alter a cell length with reduction of a manufacturing cost so that a spacer can be securely positioned at a desired position, a cell includes: a pair of optical windows sandwiching a flow channel; a cell body provided with an accommodating recess and a solution introduction part and a solution deriving part; a pair of light transmitting members in the accommodating recess and forming the pair of optical windows; a spacer defining a distance between the opposing surfaces of the pair of light transmitting members; and a pressing mechanism for pressing the light transmitting members and the spacer toward the bottom surface of the accommodating recess so as to form the flow channel, wherein a positioning recess having a shape corresponding to the spacer is provided on at least one of the opposing surfaces and the spacer is fitted therein. | 12-08-2011 |
| 20110285998 | ADSORPTIVE GAS ANALYZER - This invention makes it possible to measure a concentration of a gas component having the adsorption even thought the concentration is low, and to improve a response speed of the measurement of the concentration, and comprises a body that has an introduction port to introduce a sample gas into a measurement cell, a laser light irradiation part that irradiates the laser light on the measurement cell, a heating pipe that applies heat to the sample gas introduced into the introduction port, a flow rate limit part that makes the sample gas at a negative pressure and that introduces the negative-pressurized heated sample gas into the body, and a negative pressure pump that keeps inside of the measurement cell and a flow channel from a downstream side of the flow rate limit part to the measurement cell at the negative pressure. | 11-24-2011 |
| 20110213581 | PARTICLE SIZE DISTRIBUTION MEASURING DEVICE - To facilitate evaluation of a measurement condition in order to set an optimum measurement condition for each sample. A particle size distribution measuring device is provided with: an device main body that measures a particle size distribution of a sample; and an interface device that receives an input from an operator to perform drive control of the device main body, and receives a measurement result from the device main body to display the measurement result, wherein the interface device displays, in a graph, a relationship between values of operational parameters, which are to be set to measure the particle size distribution, and values of evaluation parameters obtained by using the measurement result from the device main body, which correspond to each of the values of the operational parameters. | 09-01-2011 |
| 20110194977 | LIQUID CONTAINER FOR ANALYSIS - A liquid container for analysis is provided to prevent outside liquid leakage from occurring when a needle is inserted into a seal part of a liquid container for analysis. The liquid container for analysis may contain a liquid for analysis and may include: a container main body formed having an opening part that enables the liquid for analysis to be led out; a seal part that seals the opening part; and a guide part that is provided outside the seal part, serving as a guide for inserting a liquid lead-out needle into the seal part, and upon insertion of the liquid lead-out needle into the seal part, coming into substantially liquid-tight contact with an outer circumferential surface of the liquid lead-out needle. | 08-11-2011 |
| 20110192219 | LIQUID SAMPLE ANALYZER - The present invention removes an air bubble attaching to a detection part arranged in a concave portion on a wall surface in a flow path or an air bubble generated in the vicinity without requiring an external driving force, in a simple configuration. Specifically, the present invention includes: a liquid sample flow path for circulating a liquid sample; a detection part contained and arranged in a stepwise concave portion formed on an inner wall surface of the liquid sample flow path; and a projection part provided at a position facing to the stepwise concave portion on an inner wall surface of the liquid sample flow path, for generating a turbulent flow on a front side of an opening of the stepwise concave portion. | 08-11-2011 |
| 20110192218 | LIQUID SAMPLE QUANTITY DETERMINER - A slide type liquid sample quantity determiner is provided that may enable the whole of a quantity determining flow path to be surely filled with a liquid sample, and also a quantity determination time to be shortened. An upstream side capillary flow path, a quantity determining capillary flow path, and a downstream side capillary flow path are reduced in diameter in this order. When a slide body is at a liquid sample quantity determination position X, an upstream side opening of the quantity determining capillary flow path is contained in a downstream side opening of the upstream side capillary flow path, and an upstream side opening of the downstream side capillary flow path is contained in a downstream side opening of the quantity determining capillary flow path. | 08-11-2011 |
| 20110192145 | PARTICULATE MATTER MEASURING DEVICE - An object of this invention is to improve resistance to heat and to increase a measurable range of a pressure without increasing a cost. In order to attain the object, a first unit arranged near an exhaust gas pipe and a second unit arranged separately from the first unit and connected to the first unit through a connecting pipe are provided, and the first unit has an exhaust gas flow channel from one end of which an exhaust gas is introduced, an orifice part arranged in a midst of the exhaust gas flow channel, a pressure rising check valve of a mechanically operating type that is connected to a downstream side of the orifice part in the exhaust gas flow channel, and a dilution gas flow channel that is connected to a downstream side of the orifice part in the exhaust gas flow channel so that the diluted exhaust gas diluted by the dilution gas is derived from the other end of the exhaust gas flow channel. | 08-11-2011 |
| 20110186939 | SEMICONDUCTOR TYPE GAS SENSOR AND MANUFACTURING METHOD THEREOF - This invention provides a semiconductor type gas sensor that can considerably increase the detection sensitivity to low-concentration gases, and can increase the response-recovery speed to achieve a conspicuous improvement in the overall performance, as well as a manufacturing method thereof. | 08-04-2011 |
| 20110181869 | PARTICLE CHARACTERIZATION DEVICE - Provided is a particle characterization device that can ensure measurement accuracy even though light detecting means has a single configuration, and enables the number of optical elements to be decreased as much as possible to suppress cost increase and reduce the number of adjustment places, and the particle characterization device has an incident side polarizer and an incident side ¼ wavelength plate as an illumination optical system mechanism and, as a light receiving optical system mechanism, an exit side ¼ wavelength plate and an exit side polarizer that can be rotated to a plurality of angle positions around a cell, wherein light attenuating means that prevents a polarization state from being changed is provided on a light path, and a light attenuation rate by the light attenuating means is controlled such that a detected light intensity at each measurement position falls within a measurement range of light detecting means. | 07-28-2011 |
| 20110160911 | DRIVING CONTROLLER, DRIVING CONTROL PROGRAM, AND MEASURING DEVICE - In order to possibly suppress noise components contained in a signal value of a detection signal for use in controlling a rate of rotations or speed, an driving controller receives a detection signal in accordance with a rate of rotations or speed and acquires a signal value of the detection signal every predetermined sampling time, and controls an actuator at control timings with predetermined intervals using the signal value, so that the rate of rotations or speed is controlled at each of the control timings in accordance with variation aspects of a plurality of signal values acquired before the outstanding control timing. | 06-30-2011 |
| 20110158854 | HYDROGEN CONCENTRATION MEASURING INSTRUMENT - This invention is to obtain a highly reliable measurement result by correcting a hydrogen concentration by the use of a concentration of oxygen contained in a measurement gas, and the hydrogen concentration measuring instrument comprises a hydrogen concentration measuring part | 06-30-2011 |
| 20110155264 | SOURCE GAS CONCENTRATION CONTROL SYSTEM - To prevent loss of control of a pressure of a source gas within a movable range of a control valve, a source gas concentration control system is provided. The system may include a first valve that is provided on an outlet line, a concentration measurement part that measures a concentration of the source gas in mixed gas, and a concentration control part that controls a stroke of the first valve such that the measured concentration of the source gas becomes equal to a predetermined concentration setting. The measured concentration may be measured in the concentration measurement part. The system may further include a temperature controller that controls a temperature inside the tank to meet a temperature setting, and a temperature setting part that sets the temperature setting of the temperature controller. | 06-30-2011 |
| 20110154891 | EGR RATIO MEASURING DEVICE - In order to improve a measurement accuracy of an EGR ratio and to downsize the device and to save labor, the EGR ratio measuring device comprises a pair of nondispersive infrared gas analyzers ( | 06-30-2011 |
| 20110120096 | PARTICULATE MATTER MEASUREMENT DEVICE - Disclosed is a particulate matter measurement device that continuously measures changes in a mass of PM contained in an exhaust gas under dynamic operating conditions, such as road travel, with a simple construction. The device dilutes and separates the flow of exhaust gas while an engine is operating. The particulate matters contained in one of the exhaust gas streams is collected by a collection filter to measure the mass and the remainder is measured by a mass-related value measurement means so that physical properties which indirectly indicate the mass of the particulate matters contained in the exhaust gas are continuously measured as time series change data. Then, time series change data for the mass of the particulate matter are found based on correlations of the individual measured data. With this configuration, the flow volume of the dilute exhaust gas that passes through the collection filter and the flow volume of the dilute exhaust gas that is introduced into the mass-related value measurement means are ensured by adjusting the flow volume of the diluting gas that dilutes the exhaust gas. | 05-26-2011 |
| 20110117000 | METHOD FOR REFINING DILUTION AIR AND DILUTION AIR REFINERY - An object of this invention is to diminish a ratio of a concentration of N | 05-19-2011 |
| 20110103547 | CONCENTRATION MEASURING METHOD AND FLUORESCENT X-RAY SPECTROMETER - In the present invention, a fluorescent X-ray analysis is made for a sample such as a liquid fuel including an object component such as sulfur. A background related to scattered X-rays and a system peak is subtracted from a fluorescent X-ray intensity of the object component, which is obtained from a spectrum acquired by the fluorescent X-ray analysis. A correction corresponding to the composition of the sample is performed for the fluorescent X-ray intensity obtained by subtracting the background. A calibration curve representing the relation between a value, which is obtained after performing the correction for the fluorescent X-ray intensity obtained by subtracting the background, and a concentration of the object component is preset. The concentration of the object component in the sample is calculated on the basis of the calibration curve. | 05-05-2011 |
| 20110043792 | ANALYZER - This invention is to make the detection sensitivities as even as possible among a plurality of specimens to be inspected in an analyzer that leads light transmitted from the plurality of specimens to be inspected to a single spectrometer via optical fibers, the analyzer includes first and second light guide members provided for every first and second specimen to be inspected so as to lead the light obtained from each of the specimens to be inspected to a photo-detecting part, and light projection side end portions of a plurality of optical fiber elements composing the first and second light guide members are arranged in mixture. | 02-24-2011 |
| 20110035189 | SPECTROSCOPIC REFLECTOMETER - In a spectroscopic reflectometer, in order to make it possible to omit a supplementary measurement (specifically, measurement of a calibration sample) which has been needed every time a light reflectance of an inspection work is measured to promote the reduction in measurement time and simplification in measurement configuration, an internal reflection mechanism having a constant light reflectance is arranged inside a head so that light reflected by the internal reflection mechanism is received by a photo-detector, whereby the light reflectance of the inspection work is calculated based on an output value of the photo-detector in a state of having substantially no light introduced, an output value of the photo-detector when a dark sample that substantially reflects no light is used, an output value that is an output value of the photo-detector when a calibration sample of a known light reflectance is used as the object, and an output value of the photo-detector when an inspection work to be measured is used. | 02-10-2011 |
| 20110019183 | OPTICAL ANALYZER AND WAVELENGTH STABILIZED LASER DEVICE FOR ANALYZER - Provided is an optical analyzer which can promote enhancement of measurement sensitivity, cost reduction, size reduction, structural flexibility, disturbance resistance, and the like, at the same time. A laser device to be used in such optical analyzer is also provided. An optical analyzer comprises a laser light source ( | 01-27-2011 |
| 20100300175 | EXHAUST GAS ANALYZER AND PROBE UNIT - A probe unit includes a gas sensor having multiple gas introduction bores for introducing a gas into an inside of the gas sensor, and a sensor holder inside of which the gas sensor is held and that is arranged inside of a duct so as to introduce an exhaust gas flowing in the duct into the gas sensor. A calibration gas flow channel is arranged in the sensor holder and has an opening at an inner surface of a side wall, surrounding the gas introduction bores of the gas sensor, of the sensor holder so as to supply a calibration gas to the gas sensor. A guide groove is arranged continuous to the opening of the calibration gas flow channel and arranged on the inner surface of the side wall along an arranging direction of the multiple gas introduction bores to face the multiple gas introduction bores. | 12-02-2010 |
| 20100242573 | THERMAL CONDUCTIVITY SENSOR - The measurement sensitivity is improved by suppressing the surrounding temperature influence as much as possible, while realizing scale reduction, and by enlarging the detection signal, while reducing the production errors in enclosing a reference gas. Provided is a thermal conductivity sensor that detects thermal conductivity of a sample gas by using a Wheatstone Bridge circuit constructed in such a manner that measurement resistors that are brought into contact with the sample gas are disposed on a first side, and reference resistors that are brought into contact with a reference gas are disposed on a second side, and comparing the potential difference between connection points of the reference resistors and the measurement resistors. The measurement resistors disposed on the first side are assembled in one measurement space, and the reference resistors disposed on the second side are assembled in one reference space. | 09-30-2010 |
| 20100229902 | PARTICLE INSPECTION AND REMOVAL APPARATUS AND PARTICLE INSPECTION AND REMOVAL PROGRAM - The present invention is to lessen work burden on a user, to eliminate determination error, to prevent a substrate from being damaged, and to prevent prolonged working time by automatically determining whether or not a particle to be removed is present. A particle inspection and removal apparatus of the present invention includes a particle information acquisition section acquiring particle information on a particle adhering onto a substrate surface, a particle removal section removing the particle adhering onto the substrate surface, a comparison section comparing a threshold set for each of regions of the substrate surface with the particle information on each of the region obtained by the particle information acquisition section, and a particle removal control section controlling the particle removal section to remove the particle on the substrate surface based on a comparison result of the comparison section. | 09-16-2010 |
| 20100221148 | COMBUSTIBLE GAS SENSOR - The present invention provides a combustible gas sensor that can realize a considerable improvement in the measurement sensitivity and the measurement precision by increasing the contact area between the measurement object gas and the oxidation catalyst particles, increasing the amount of heat generation of oxidation reaction in accordance therewith, and improving the transference of the oxidation reaction heat, while reducing the scale of the whole. | 09-02-2010 |
| 20100179046 | GLASS ELECTRODE AND SENSITIVE GLASS FOR THE GLASS ELECTRODE - Disclosed is a sensitive glass for use in a pH-sensitive glass electrode, which comprises at least Me | 07-15-2010 |
| 20100108154 | MATERIAL GAS CONCENTRATION CONTROL SYSTEM - A material gas concentration control system for keeping a concentration of a material gas in a mixed gas constant comprising a tank to accommodate the material, an inlet line to input a carrier gas for evaporating the accommodated material into the tank, and an outlet line to output the mixed gas consisting of the material gas evaporated in the tank and the carrier gas, and further comprising a first valve arranged in the inlet line, a concentration measuring part that measures the concentration of the material gas in the mixed gas, and a concentration control part that controls an open degree of the first valve so as to make the measured concentration of the material gas measured by the concentration measuring part become the previously determined set concentration. | 05-06-2010 |
| 20100108153 | MATERIAL GAS CONCENTRATION CONTROL SYSTEM - An object of this invention is to provide a responsive material gas concentration control system that can be mounted on a bubbling system and that can control a concentration of a material gas in a mixed gas at a constant value even though a partial pressure of the material gas fluctuates. The material gas concentration control system is used for a material evaporation system, and comprises a body that is connected to an outlet line and that has an internal flow channel for flowing the mixed gas, a concentration measuring part that measures the concentration of the material gas in the mixed gas, and a first valve that is arranged downstream of the concentration measuring part and that adjusts the measured concentration measured by the concentration measuring part at a previously determined set concentration, wherein the concentration measuring part and the first valve are mounted on the body. | 05-06-2010 |
| 20100050790 | STACK-GAS MEASURING APPARATUS AND STACK-GAS MEASURING METHOD - A stack-gas measuring apparatus includes a sample introducing unit (sampling unit and heating conduit pipe) for introducing stack-gas, a cooling unit (containing wet filter ) in which dust components in the stack-gas are agglomerated, a filter column containing a filter element made of a polymer material for collecting the dust components, a mist scrubber which is disposed downstream of the filter column and which contains an adsorbent for removing acid mist in the stack-gas, and an analyzer in which the cleaning-processed gas is introduced to measure a particular component in the stack-gas. | 03-04-2010 |
| 20100031758 | ANALYTICAL SAMPLE DRYING METHOD AND DRYING APPARATUS - A soil for metal analysis having a high water content of 40% or more is dried up to 20% or less in water content within a short period of time. | 02-11-2010 |
| 20100025235 | METHOD FOR PRODUCTION OF RESPONSIVE GLASS MEMBRANE FOR ION ELECTRODE, RESPONSIVE GLASS MEMBRANE FOR ION ELECTRODE, AND ION ELECTRODE - Disclosed is a sensitive glass film for a pH electrode, which is not deteriorated in its glass strength or pH-measuring function, which is hardly stained, and from which any stain can be removed easily. Also disclosed is a pH electrode having the sensitive glass film. A microparticle comprising rutile-type or brookite-type titanium dioxide or a microparticle comprising amorphous titanium dioxide is adhered directly on the glass film surface of a sensitive glass film for a pH electrode. | 02-04-2010 |
| 20100024571 | ROTATIONAL TESTING SYSTEM - A rotational testing system for a test article includes a rotational test stand. The rotational test stand includes a rotating element having a drive end capable of being mechanically coupled with the test article. The rotational testing system also includes a non-isolating torsional damper attached to the rotating element. | 02-04-2010 |
| 20090287424 | METHOD AND APPARATUS OF MEASURING PARTICULATE MATTERS - An apparatus for measuring particulate matters includes a particulate matters collecting part | 11-19-2009 |
| 20090283404 | Reference Electrode Coated with Ionic Liquid and Electrochemical Measurement System Using the Reference Electrode - This invention provides a reference electrode ( | 11-19-2009 |
| 20090096067 | METHOD OF FABRICATING A METAL OXYNITRIDE THIN FILM THAT INCLUDES A FIRST ANNEALING OF A METAL OXIDE FILM IN A NITROGEN-CONTAINING ATMOSPHERE TO FORM A METAL OXYNITRIDE FILM AND A SECOND ANNEALING OF THE METAL OXYNITRIDE FILM IN AN OXIDIZING ATMOSPHERE - After the surface of the substrate is cleaned, an interface layer or an antidiffusion film is formed. A metal oxide film is built upon the antidiffusion film. Annealing is done in an NH | 04-16-2009 |
| 20090094950 | CALIBRATION UNIT FOR VOLATILE PARTICLE REMOVER - A penetration and removal efficiency calibration unit for a volatile particle remover in a solid particle counting system provides an accurate and efficient approach to calibration. The calibration unit includes an aerosol inlet, a flow meter downstream of the aerosol inlet, and a mixer. The flow meter receives the aerosol flow from the aerosol inlet and provides an output flow to the mixer. The mixer receives the output flow from the flow meter and also has a dilution gas inlet. The mixer provides a mixer output flow for reception by the volatile particle remover or particle counter. A first flow controller controls flow into the dilution gas inlet. The calibration unit also includes a bypass inlet. A second flow controller controls flow into the bypass inlet, and a control loop controls the bypass flow such that the aerosol flow tracks a reference value. | 04-16-2009 |
| 20090091756 | CORRELATOR - In order to improve an accuracy of an autocorrelation function, a correlator comprises a counter | 04-09-2009 |
| 20090084200 | EXHAUST GAS DILUTION DEVICE - An exhaust gas dilution device | 04-02-2009 |
| 20090073460 | SUBSTRATE MEASURING STAGE - To improve position reproducibility of support pins | 03-19-2009 |
| 20090073438 | PARTICLE SIZE DISTRIBUTION MEASURING DEVICE - This invention may measure the sprayed particle sprayed from the nozzle safely with the use of a conventional particle size distribution measuring device The particle size distribution measuring device may measure particle size distribution of a particle group, and may include a device body comprising a light source that irradiates light on the particle group and a light detector that detects intensity of diffracted light or/and scattered light generated by irradiation of the light, a spray measuring system that introduces a sprayed particle group as being the particle group sprayed from a nozzle into a measuring area between the light source and the light detector , and an ordinary measuring system that arranges a measuring cell that accommodates an ordinary particle group as being a particle group other than the sprayed particle group between the light source and the light detector are arranged to be exchangeable for each other. | 03-19-2009 |
| 20090050779 | VIBRATION ISOLATION SYSTEM - The present invention may improve an accuracy of a carried position of a semiconductor wafer W to a loading board. The vibration isolation system may be characterized by comprising a base, a loading board that loads a wafer stage on which a semiconductor wafer W is placed, a spring element that is arranged on the base and that supports the loading board and isolates the loading board from a source of vibration, and a positioning mechanism that nullifies the vibration isolation effect of the spring element and that positions the loading board at a predetermined position to the base at a time of placing the semiconductor wafer W on the wafer stage. | 02-26-2009 |
| 20090003125 | EXHAUST GAS ANALYZER - An SOF measuring system that can continuously measure SOF and a soot measuring system that can continuously measure soot are connected with an exhaust gas line. The soot measuring system comprises a diluter that selectively dilutes either one of the exhaust gas and standard gas whose hydrocarbon concentration is known with diluent gas and extrudes it. A dilution ratio adjusting device can adjust a dilution ratio of the diluter. A soot detector continuously detects soot in the exhaust gas or the standard gas diluted by the diluter. The SOF measuring system can be connected with the diluter so that an exhaust gas analyzer can measure the hydrocarbon concentration in the standard gas diluted by the diluter. | 01-01-2009 |
