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HORIBA ADVANCED TECHNO, CO., LTD.

HORIBA ADVANCED TECHNO, CO., LTD. Patent applications
Patent application numberTitlePublished
20110133099SILICON CONCENTRATION MEASURING INSTRUMENT - The present invention is an instrument that detects a trace amount of silicon contained in a sample solution with simple means and measures a silicon concentration in the sample solution, and adapted to include: an excitation light irradiation part that irradiates the sample solution with excitation light for silicon; a light detection part that detects fluorescence and/or scattering light emitted from silicon in the sample solution irradiated with the excitation light; and a calculation part that calculates the silicon concentration in the sample solution from intensities or an intensity of the fluorescence and/or the scattering light.06-09-2011