HITACI KOKUSAI ELECTRIC INC.
HITACI KOKUSAI ELECTRIC INC. Patent applications | ||
Patent application number | Title | Published |
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20130098291 | SUBSTRATE TREATMENT EQUIPMENT AND MANUFACTURING METHOD OF SUBSTRATE - The invention aims to provide substrate treatment equipment that can automatically collect a substrate in a normal condition without needing manual operation. The equipment includes a substrate holder | 04-25-2013 |