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Hirata Corporation

Hirata Corporation Patent applications
Patent application numberTitlePublished
20120118083Substrate Carrier Measuring Jig, Collision Preventing Jig, and Collision Preventing Method Using the Collision Preventing Jig - [Objective] To provide a wafer carrier measuring jig which can measure a slot height of a wafer carrier placed on a load port and which can determine whether or not an arbitrary slot is horizontal, a collision preventing jig, and a collision preventing method using the collision preventing jig.05-17-2012
20110264403CLEARANCE MEASURING METHOD AND MEASURING UNIT - The present invention provides a method for measuring a clearance (10-27-2011
20110253508ROLLER ASSEMBLY, ROLLER UNIT, AND CONVEYOR APPARATUS - This invention provides a roller assembly including a rotary member including a driving shaft portion and a convey roller portion provided with the driving shaft portion, a driving wheel including a hole portion and attached to the driving shaft portion, the driving wheel being driven to rotate, a transmission receiving portion radially extending outward from the driving shaft portion and rotated together with the driving shaft portion, a friction transmission member clamped between the transmission receiving portion and a side surface of the driving wheel and frictionally transmitting a rotational force of the driving wheel to a rotary member, and a biasing portion applying a clamping force between the transmission receiving portion and the side surface of the driving wheel.10-20-2011
20110188977FOUP OPENER AND OPERATING METHOD THEREOF - To ensure that an abnormality in a closed state of a FOUP door serving as a lid of a FOUP can be detected quickly and reliably, a FOUP opener includes a port door attached detachably to an opening window in a port plate for separating the interior and exterior of a semiconductor processing device, and a dock unit for positioning the FOUP in a FOUP door attachment/detachment position. A suction disc mechanism and a lock mechanism for fixing the FOUP door to a FOUP main body and releasing the FOUP door are disposed on the port door. A FOUP door detection sensor for determining whether or not the FOUP door fixed to the FOUP main body, which is positioned in the FOUP door attachment/detachment position on the dock unit, is attached correctly to an opening portion of the FOUP main body is disposed on the port plate.08-04-2011
20110185569METHOD AND DEVICE FOR ADJUSTING VALVE CLEARANCE - A method for adjusting a valve clearance in a cylinder head using a rocker arm of a support point adjustable type. In the method, an adjustment screw is rotated in one direction until a camshaft comes in contact with a cam shaft contact section to make the amount of valve opening zero, then further rotated until the valve is released with a certain valve opening amount, and after that, rotated in a reverse direction by a certain rotation angle and accordingly loosened until a desired valve clearance value is obtained. In the process above, the method determines a first rotation angle of the adjustment screw necessary for the adjustment screw to move from a position where the valve is released with the certain valve opening amount to a position where the camshaft comes in contact with the camshaft contact section. Then, the method determines a second rotation angle of the adjustment screw necessary for the adjustment screw to move from the position where the camshaft comes in contact with the camshaft contact section to a position where the desired valve clearance value can be obtained. After that, the method rotates the adjustment screw in the reverse direction by a given rotation angle that is a sum of the first and second rotation angles.08-04-2011
20110174254METHOD AND DEVICE FOR MEASURING AND ADJUSTING VALVE CLEARANCE - The present invention provides a method and a device for accurately measuring and adjusting a valve clearance value to a desired value in an engine having a rocker-arm-type valve.07-21-2011
20110165531CARRIER POSITIONING METHOD AND CARRIER TRANSPORT SYSTEM - A carrier transport system transports a plurality of carriers by a transport conveyor into a heating furnace, advances a comb-shaped carrier stopper having a plurality of protrusions toward the carriers, moves the carriers by the transport conveyor in a transport direction to engage cutout grooves, provided respectively for the carriers, with the protrusions of the carrier stopper to thereby position the carriers at a time. The carrier transport system advances the carrier stopper toward the carriers to insert distal ends of the protrusions of the carrier stopper into insertion holes, and then determines, on the basis of a moved distance X of the carrier stopper, whether the carriers are properly positioned.07-07-2011
20110057373WORK INSPECTOR AND CARRIER - A work inspector and carrier according to the present invention includes a carrier unit (03-10-2011
20110024264WORK TRANSFER APPARATUS - A work transfer apparatus comprising a retaining unit (02-03-2011
20100239397SUBSTRATE TRANSPORT APPARATUS AND CONTROL METHOD FOR SUBSTRATE TRANSPORT APPARATUS - This invention provides a substrate transport apparatus (09-23-2010
20100222923Device amd method for teaching work delivery position to robot - [PROBLEMS] To provide a device and a method for teaching a work delivery position to a robot capable of teaching to the robot at low cost in a short time.09-02-2010
20100206688COOLING METHOD OF CARRYING SECTION AND CARRIER - In a cooling method of a carrying section including a conveyor for carrying an inverter component, a heating furnace covering a part of the carrying conveyor and heating the inverter component, and a mechanism for cooling the carrying conveyor and cooling the carrying conveyor by means of the cooling mechanism, the conveyor for carrying the inverter component is provided with a roller for carrying the inverter component by touching it, a roller cooling member surrounding the outer periphery of the carrying roller and having an opening for projecting a part of the outer periphery of the carrying roller is provided as the cooling mechanism, and the carrying roller heated by the heat of the heating furnace is cooled by the roller cooling member.08-19-2010
20100194061Head Used For Attracting a Workpiece - A workpiece vacuum chuck head, which serves to vacuum-chuck a light, minute workpiece and to release and place the vacuum-chucked workpiece on a workpiece placement surface, includes a base section, a workpiece vacuum chuck section, and a follower mechanism section for connecting together the base section and the workpiece vacuum chuck section. These sections form an integral structure. The base section has an attachment surface for attaching the workpiece vacuum chuck head to a head drive mechanism. The workpiece vacuum chuck section has a workpiece vacuum chuck surface and a negative-pressure chamber, which opens at the workpiece vacuum chuck surface via a suction hole. The follower mechanism section has a structure that is easily elastically deformable, and is appropriately deformed in a three-dimensional space so as to cause the workpiece vacuum chuck surface to follow an inclination of the workpiece placement surface.08-05-2010
20100121479DECOMPRESSING TYPE HEATER, ITS HEATING METHOD, AND ELECTRONIC PRODUCT MANUFACTURING METHOD - An object is heated to a preheating temperature in an atmosphere of a reducing gas under the atmospheric pressure while adjusting the setting of the emissivity of a non-contact temperature measuring part and regulating the temperature of the object according to the measured value measured by a contact temperature measuring part. The pressure of the atmosphere is reduced. The object is further heated to a heating temperature under a lowered pressure while regulating the temperature of the object according to the measured value measured by the non-contact temperature measuring part whose setting of the emissivity is adjusted during the heating process to the preheating temperature. The pressure of the atmosphere is increased back to the atmospheric pressure while maintaining the heating temperature of the object. The temperature of the object is decreased under the atmospheric pressure. With this, in the process of heating an object under a lowered pressure, the actual temperature of the object is managed over the whole steps, and the object can be most suitably heated according to the actual temperature.05-13-2010
20100089720METHOD OF POSITIONING CONVEYANCE SECTION, AND CONVEYANCE DEVICE - A conveyance section positioning method has carrier pallets (04-15-2010
20100054993Microplate Mounting Stand, and Analyte Testing/Observing Apparatus Equipped Therewith - [Objective] An object is to provide an analyte testing/observing apparatus which can prevent evaporation and drying of an analyte and a reagent accommodated, before being dispensed, in a plurality of wells formed in microplates, to thereby stabilize the reaction between the analyte and the reagent and improve the accuracy of analyte test, and which can reduce the required space.03-04-2010
20090325116Heating furnace and heating method employed by heating furnace - A hydrogen vacuum furnace (12-31-2009
20090321219Overhead Transfer/Storage System and Overhead Transfer/Storage Method - In an overhead conveyance/storage system 12-31-2009
20090300904Assembling Object/Component Mounting Pallet and Assembling Equipment - A carrier pallet 12-10-2009
20090265031AUTOMATIC WAREHOUSE - An automatic warehouse 10-22-2009
20090202331Storage Device - A storage device 08-13-2009
20090183969TRANSPORT SYSTEM - A transport system of this invention includes a transport means for forming a plurality of transport paths from a transport source to a transport destination and transporting a work via a transport path selected from the plurality of transport paths, a control means for controlling the transport means, and a read means for, when the work has arrived at a branch point in the transport path, reading out, from a storage medium, transport path information representing a transport direction of the work at the branch point in the transport path, the storage medium being provided on the work and storing the transport path information. The control means controls the transport means to transport the work in the transport direction of the work at the branch point represented by the transport path information read out by the read means.07-23-2009
20090169345Tray Holding Device - A tray holding device includes a frame (07-02-2009
20090099686Work transfer system, route setting method, and route setting program - A route setting method according to the present invention sets, in a work transfer system including a plurality of work transfer units which connect a plurality of loading places to a plurality of unloading places, a route of the work transfer units to pass a work between a planned loading place and a planned unloading place which are required to transfer the work in the plurality of loading places and the plurality of unloading places. The route setting method includes the steps of setting, based on layout information representing a layout of the plurality of work transfer units, a plurality of candidates of the route between the planned loading place and the planned unloading place, and selecting, based on a predetermined condition, one route from the plurality of candidates of the route set in the candidate setting step.04-16-2009
20090067955Foup Door Positioning Device for Foup Opener - The FOUP door positioning device of a FOUP opener is compatible with all kinds of FOUPs, is inexpensive, and has a simple positioning-ping adjustment mechanism. In a state in which a flange portion (a portion having a taper 03-12-2009
20090045699Precise Positioning Apparatus - A precision positioning device 02-19-2009

Patent applications by Hirata Corporation