| 20120261339 | RECYCLING METHOD AND DEVICE FOR RECYCLING WASTE WATER CONTAINING SLURRY FROM A SEMI-CONDUCTOR TREATMENT PROCESS, IN PARTICULAR FROM A CHEMICO-MECHANICAL POLISHING PROCESS - A method for recycling waste water containing slurry from a semiconductor treatment process; including: Filtration in which waste water containing the fresh slurry is continuously introduced into a circulation tank, during which time the mixed waste water is continuously extracted from the circulation tank, the extracted waste water is guided through an ultrafilter device and is concentrated by removing the fluid to form concentrated waste water and the concentrated waste water is introduced into the circulation tank and mixed with the contents of the circulation tank; and concentration in which the addition of fresh waste water to the circulation tank is essentially stopped when the mixed waste water is continuously extracted from the circulation tank, said extracted mixed water waster being introduced through the ultrafilter device and is concentrated by removing the fluid to form concentrated waste water and the concentrated waste water is introduced into the circulation tank. | 10-18-2012 |
