| Gudeng Precision Industrial Co., Ltd. Patent applications |
| Patent application number | Title | Published |
|---|
| 20110174389 | Sealing Apparatus with Interlocking Air Inflation Device for Wafer Carrier - The present invention relates a sealing apparatus with interlocking air inflation device for wafer carrier and a sealing method thereof, wherein the sealing apparatus is disposed between a wafer container and a cover of a wafer carrier, used for sealing the cover and the wafer container when the cover is closed to the wafer container. The sealing apparatus comprises: at least one latch set, at least one interlocked cam, an air inflation sealing member, and at least one air intake/outtake valve, wherein the interlocked cam is adopted for connecting an interlocking device having an air inflation member, and the interlocking device can be used to drive the interlocked cam for making the latch set bolt the cover and the wafer container, and inflate the air inflation sealing member through the air inflation member thereof and the air intake/outtake valve in order to inflate and expand the air inflation sealing member. | 07-21-2011 |
| 20100078894 | SEALING APPARATUS OF WAFER CARRIER AND SEALING METHOD THEREOF - The present invention discloses a sealing apparatus of a wafer carrier and a sealing method, and the wafer carrier is comprised of a wafer container and a cover, and includes a latch unit for integrally latch the wafer container and the cover. The wafer container has an open distal portion disposed on a surface of wafer container, and the sealing apparatus is installed between the open distal portion and the cover. The sealing apparatus includes an air intake/outtake valve and an air inflation sealing unit coupled to the air intake/outtake valve, and the air intake/outtake valve performs an air inflation to expand the air inflation sealing unit, and the wafer container and the cover are elastically latched after the inflation and the expansion of the air inflation sealing unit to achieve the sealing effect. | 04-01-2010 |
