FUJIKIN INCORPORATED Patent applications |
Patent application number | Title | Published |
20160084700 | FASTENING STRUCTURE FOR BRITTLE-FRACTURABLE PANEL, AND METHOD FOR FASTENING LIGHT TRANSMISSION WINDOW PANEL COMPRISING BRITTLE-FRACTURABLE PANEL EMPLOYING SAME - A fastening structure of a brittle-fracturable panel material includes a first fastening flange, a second fastening flange, and a light transmission window panel made of a brittle-fracturable panel material, wherein the light transmission window panel is nipped between the first fastening flange and the second fastening flange, and both fastening flanges are air-tightly fitted and fastened. | 03-24-2016 |
20160070271 | MULTI-HOLE ORIFICE PLATE FOR FLOW CONTROL, AND FLOW CONTROLLER USING THE SAME - A multi-hole orifice plate for flow control includes an orifice plate for controlling the flow rate of a fluid, wherein the opening area of one orifice necessary for the passage of a predetermined flow rate of fluid is divided to provide a plurality of orifices having a total opening area equal to said opening area. | 03-10-2016 |
20160047483 | FLOW CONTROL VALVE FOR FLOW CONTROLLER - A flow control valve for a flow controller includes a valve main body provided with an open-top valve chamber hole, a metal diaphragm valve element, a lower support cylinder having notches facing each other, an upper support cylinder attached to the lower support cylinder, a support frame horizontally disposed through the notches of the lower support cylinder, a disc spring placed between the support frame and a bottom of the lower support cylinder, a lower cradle placed on the support frame, a piezoelectric element inserted into the support cylinder above the lower cradle, a guide fixed to the valve main body together with the support frame with the support cylinder being inserted through the guide cylinder in a vertically movable manner. The support cylinder is pressed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force. | 02-18-2016 |
20150362105 | GASKET-INTEGRATED CERAMIC ORIFICE PLATE - Gasket-integrated orifice plates including a first orifice base ( | 12-17-2015 |
20150233412 | BOLT-LOCKING APPARATUS, MOUNTING METHOD THEREOF AND MOUNTING JIG - A bolt-locking apparatus includes a plurality of fitting members | 08-20-2015 |
20150152969 | PURGE LINE CHANGING BLOCK JOINT AND FLUID CONTROL APPARATUS - A purge line changing block joint for enabling supply of different types of purge gas between lines without a significant remodeling of a fluid control apparatus and the fluid control apparatus is provided. A purge line changing block joint is connected to an upper side of a three-way valve channel portion in at least one line of the plurality of lines. The purge line changing block joint includes a process gas inlet channel communicating with a process gas inlet channel of the three-way valve channel portion, an outlet channel communicating the process gas inlet channel and an outlet channel of the three-way valve channel portion, a channel terminal not in communication with a purge gas inlet channel of the three-way valve channel portion but terminating the same, and a new purge gas inlet channel communicating with the outlet channel and opening on the top surface. | 06-04-2015 |
20150143876 | LEAKAGE DETECTION DEVICE AND FLUID CONTROLLER INCLUDING SAME - There is provided a leakage detection device which can be reduced in size and attached to a leakage detection target member, such as a fluid controller, all the time, and thus, can monitor leakage of fluid all the time, and a fluid controller having the same. A fluid controller is configured by a fluid controller main body and a leakage detection device which is attached to the fluid controller main body. In the fluid controller main body, a leakage port for detecting the leakage is provided. The leakage detection device includes a sensor holding body which is attached to the fluid controller main body; an ultrasonic sensor which is held by the sensor holding body to face the leakage port; an ultrasonic passage provided between a sensor surface of the ultrasonic sensor and the leakage port; and a processing circuit for processing an ultrasonic wave obtained by the ultrasonic sensor. | 05-28-2015 |
20150136248 | FLOW CONTROL SYSTEM WITH BUILD-DOWN SYSTEM FLOW MONITORING - To provide a flow control system with build-down system flow monitoring that realizes flow monitoring close to real-time monitoring by combining build-down system flow rate measurement with the upstream side of the flow control system without using a thermal type flow sensor by effectively utilizing high pressure fluctuation resistance characteristics of the flow control system, and can be significantly downsized and reduced in cost. | 05-21-2015 |
20150115191 | DIAPHRAGM VALVE - A diaphragm valve which can solve problems of a disc-shaped diaphragm, wherein the amount of deformation is significant and dust is liable to be generated, that the change in volume in opening and closing of the fluid channel is significant, and that a pressure receiving surface area of the diaphragm at the time of channel closure is provided. A diaphragm is formed of a synthetic resin and, a cylindrical portion fixedly fitted on a valve rod, a bottom wall portion closing a lower end opening of the cylindrical portion, a flange portion provided at an upper end portion of the cylindrical portion, and a projecting portion provided at a center portion of the bottom wall portion and facing an upper end opening of a fluid inlet passage. A vertical cross-sectional shape of an axially intermediate portion of the cylindrical portion is formed into a substantially arcuate shape projecting radially outward. | 04-30-2015 |
20140373935 | GAS BRANCHED FLOW SUPPLYING APPARATUS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT - A gas branched flow supplying apparatus for semiconductor manufacturing equipment. An arithmetic and control unit | 12-25-2014 |
20140333067 | JOINT - Provided is a joint which can decrease the number of kinds of parts. A bolt | 11-13-2014 |
20140326915 | DIAPHRAGM VALVE - There is provided a diaphragm valve configured to prevent a body from being scratched significantly even when replacement of a seat is repeated. A body | 11-06-2014 |
20140312617 | PIPE JOINT - Provided is a pipe joint which can prevent fine particles generated when a male threaded member and a female threaded member are threadedly engaged with each other from entering a fluid passage thus maintaining a high degree of cleanliness. Joint members | 10-23-2014 |
20140299206 | RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS EQUIPPED WITH RAW MATERIAL CONCENTRATION - An apparatus able to regulate a raw material concentration, in a mixed gas of carrier gas and raw material gas, accurately and stably to supply the mixed gas to a process chamber, with a flow rate controlled highly accurately, thereby detecting a vapor concentration of the raw material gas in the mixed gas easily and highly accurately and displaying the concentration in real time without using an expensive concentration meter, etc. | 10-09-2014 |
20140299201 | GAS SUPPLYING APPARATUS - A gas supply line and gas supplying apparatus that facilitates maintenance and management of various types of devices. The supplying apparatus is formed with a supply line that is made up of a gas inlet-side block, a gas outlet-side block and a plurality of fluid control devices. The gas supplying apparatus is formed with at least two gas supply lines, the fluid control device of each gas supply line includes at least one flow controller, an inlet-side block of the flow controller on one gas supplying line is connected to an inlet-side block of the flow controller on the other gas supply line so as to oppose the inlet-side block, and an outlet-side block of one flow controller is connected to an outlet-side block of the other flow controller so as to oppose the gas outlet-side block. | 10-09-2014 |
20140239130 | FLUID CONTROL DEVICE - Provided is a fluid control device which can shorten an assembling time by facilitating positioning of a line support member and can suppress the increase of a height of a portion which supports fluid control equipment. A base member is formed in a rectangular frame shape by an upper lateral frame member, a lower lateral frame member, and left and right longitudinal frame members which are orthogonal to the upper and lower lateral frame members. A positioning portion for positioning each line support member is provided to the respective lateral frame members. Upper and lower end portions of each line support member are clamped between the respective lateral frame members and upper and lower cover members detachably mounted on the base member in a state where the upper and lower end portions of each line support member are positioned by the positioning portions provided to the respective lateral frame members. | 08-28-2014 |
20140230911 | PRESSURE TYPE FLOW CONTROL SYSTEM WITH FLOW MONITORING, AND METHOD FOR DETECTING ANOMALY IN FLUID SUPPLY SYSTEM AND HANDLING METHOD AT ABNORMAL MONITORING FLOW RATE USING THE SAME - A pressure type flow control system with flow monitoring includes an inlet, a control valve including a pressure flow control unit connected downstream of the inlet, a thermal flow sensor connected downstream of the control valve, an orifice installed on a fluid passage communicatively connected downstream of the thermal flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet communicatively connected to the orifice, and a control unit including a pressure type flow rate arithmetic and control unit receiving a pressure signal from the pressure sensor and a temperature signal from the temperature sensor, and a flow sensor control unit to which a flow rate signal from the thermal flow sensor is input. | 08-21-2014 |
20140216575 | CHECK VALVE - To provide a check valve which can be used even under a high temperature condition by overcoming a drawback “valve element sticking to sealing member” associated with high temperature use while enhancing heat resistance. An opening of a fluid path formed in a first body is brought into a closed state by bringing a valve element biased by a biasing member into contact with a sealing member. The sealing member is formed of a post-cured perfluoro elastomer packing. An annular sealing portion which is brought into line contact with the sealing member is formed on the valve element. | 08-07-2014 |
20140216339 | RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS - A raw material vaporizing and supplying apparatus including a source tank in which a raw material is stored, a raw material gas supply channel through which raw material gas is supplied from an internal space portion of the source tank to a process chamber, a pressure type flow rate control system which is installed along the way of the supply channel, and controls a flow rate of the raw material gas which is supplied to the process chamber, and a constant temperature heating unit that heats the source tank, the supply channel, and the pressure type flow rate control system to a set temperature, wherein the raw material gas generated in an internal space portion of the source tank is supplied to the process chamber while the pressure type flow rate control system performs flow rate control. | 08-07-2014 |
20140190581 | RAW MATERIAL GAS SUPPLY APPARATUS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT - A raw material gas supply apparatus includes a liquid raw material gas supply source, a source tank storing liquid raw material, a gas distribution passage through which raw material gas comprising steam of the liquid raw material is supplied to a process chamber from the source tank, an automatic pressure regulator installed on an upstream side of the gas passage, wherein the automatic pressure regulator keeps supply pressure of the raw material gas at a set value, a supply gas switching valve installed on a downstream side of the gas passage, wherein this valve opens and closes the gas passage, an orifice provided on at least one of an inlet side or outlet side of the valve, wherein the orifice regulates flow rate of the raw material gas, and a constant temperature heating device heats the source tank, the gas passage, the valve and the orifice to a set temperature. | 07-10-2014 |
20140182692 | PRESSURE TYPE FLOW CONTROL SYSTEM WITH FLOW MONITORING - A pressure type flow control system with flow monitoring includes an inlet side passage, a control valve comprising a pressure-type flow control unit connected downstream of the inlet side passage, a thermal-type flow sensor connected downstream of the control valve, an orifice installed on a fluid passage connected downstream of the thermal-type flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet side passage connected to the orifice, and a control unit comprising a pressure-type flow rate arithmetic and control unit to which a pressure signal from the pressure sensor and a temperature signal from the temperature sensor are input, and which computes a flow rate value of fluid flowing through the orifice, and outputs a control signal to a valve drive unit of the control valve. | 07-03-2014 |
20140162094 | ELECTROCHEMICAL ELEMENT - The purpose of the present invention is to provide an electrochemical element to which a high-concentration and high-viscosity electrolyte is supplied. The electrolyte is dispersed and supplied instantaneously to the electrochemical element in a small fixed quantity. | 06-12-2014 |
20140124064 | RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS - A raw material vaporizing and supplying apparatus includes a carrier gas supply source, a source tank storing raw material, a flow passage supplying carrier gas to an internal upper space portion of the source tank, an automatic pressure regulating device installed on the flow passage, controlling pressure in the internal upper space portion to a set pressure, another flow passage supplying mixed gas (a mixture of raw material steam and carrier gas) from the internal upper space portion to a process chamber, a flow control system installed on this other flow passage, and automatically regulates a flow rate of the mixed gas supplied to the process chamber to a set flow rate, and a constant temperature heating unit that heats the source tank, a portion of the automatic pressure regulating device, a portion of the flow control system, the pipe passage, and the other pipe passage, to a set temperature. | 05-08-2014 |
20140110937 | PIPE JOINT - A pipe joint which does not generate fine particles even though being repeatedly mounted and demounted is provided. A pipe joint includes first and second joint members having fluid channels communicating with each other, an annular gasket to be interposed between abutting end surfaces of the both joint members, and a nut configured to couple the joint members. The nut is provided with an inner surface treated layer. The inner surface treated layer includes a Co (cobalt)-P (phosphorous) alloy metal coating provided on an inner surface of the nut and a fluorine coating provided on the surface of the alloy metal coating. | 04-24-2014 |
20140110936 | FIXING DEVICE FOR LOWER STAGE MEMBERS AND FLUID CONTROL DEVICE EQUIPPED WITH FIXING DEVICE - Provided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a lower-stage member is configured such that respective lower-stage members are fixed once and, thereafter, a desired lower-stage member is moved upwardly against an elastic force so as to finely adjust positions of upper surfaces of a plurality of lower-stage members. The elastic member is formed of an annular body made of rubber or a synthetic resin. A cutout which imparts the elastic deformation by bending when a force in the vertical direction is applied to the elastic member is formed on an upper portion and a lower portion of an inner peripheral surface of the elastic member. | 04-24-2014 |
20140013838 | FLOW RATE MEASUREMENT DEVICE AND FLOW RATE MEASUREMENT METHOD FOR FLOW RATE CONTROLLER FOR GAS SUPPLY DEVICE - A flow rate measurement device includes a branched pipe passage having an inlet side end portion detachably joined in a branched manner to an upstream portion of on-off valve V | 01-16-2014 |
20130340837 | DEVICE AND METHOD FOR SUPPLYING GAS WHILE DIVIDING TO CHAMBER FROM GAS SUPPLYING FACILITY EQUIPPED WITH FLOW CONTROLLER - The invention supplies a quantity Q of gas while dividing at flow rate ratio Q | 12-26-2013 |
20130333777 | OPENING DEGREE DETECTION DEVICE FOR MANUAL VALVE | 12-19-2013 |
20130319551 | OPENING DEGREE DETECTION DEVICE FOR AUTOMATICALLY OPERATED VALVE - To provide an opening degree detection device for an automatically operated valve which is easily assembled into an automatically operated valve, makes it easy to ensure detection accuracy at the time of assembling the opening degree detection device, and is easily applicable to an existing automatically operated valve. The opening degree detection device includes: a base plate | 12-05-2013 |
20130220451 | FLOW RATE RANGE VARIABLE TYPE FLOW RATE CONTROL APPARATUS - A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP | 08-29-2013 |
20130220433 | APPARATUS FOR DIVIDING AND SUPPLYING GAS AND METHOD FOR DIVIDING AND SUPPLYING GAS BY USE OF THIS APPARATUS - A gas dividing/supplying apparatus includes a pressure-type flow control system, a plurality of divided flow passages connected in parallel with each other and through which gas flowing from the pressure-type flow control system is divided and supplied to a process chamber, thermal-type mass flow sensors disposed in the divided flow passages, respectively, motor-operated valves disposed on a downstream side of the thermal-type mass flow sensors, respectively, and switching-type controllers that control opening and closing of the motor-operated valves, respectively, and, in the apparatus, the switching-type controllers perform switching between valve opening control for maintaining the motor-operated valves at a predetermined fixed valve opening degree based on a valve opening control command signal and divided flow control for regulating an opening degree of each of the motor-operated valves by feedback control based on a flow detection signal of the thermal-type mass flow sensor by a divided flow control command signal. | 08-29-2013 |
20130186471 | CALIBRATION METHOD AND FLOW RATE MEASUREMENT METHOD FOR FLOW RATE CONTROLLER FOR GAS SUPPLY DEVICE - In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve V | 07-25-2013 |
20130181148 | AIR-OPERATED VALVE - The present invention is directed to provide an air-operated valve suitable for use in a form using a one-touch joint. A casing | 07-18-2013 |
20130154253 | FLUID COUPLING - A fluid coupling capable of reliably finding absence of the gasket, if exists, in the leak test is provided. Butted end surfaces of coupling members | 06-20-2013 |
20130084059 | VAPORIZER - A vaporizer, capable of stabilizing the behavior of pressure inside the vaporizer, includes a chamber having an inlet and an outlet, a heating device that heats the inside of the chamber, a partition wall structure | 04-04-2013 |
20130037738 | BALL VALVE - A ball valve which can suppress the increasing of processing labor time and reliably prevent simultaneous rotation of a ball seat and a ball when the ball is rotated by handle manipulation is provided. The valve body | 02-14-2013 |
20130037145 | FLUID CONTROL DEVICE - A fluid control device includes two opening and closing valves | 02-14-2013 |
20130025718 | MIXED GAS SUPPLY APPARATUS - A mixed gas supply device includes a plurality of gas supply lines arranged in parallel that include flow rate control devices and outlet side switching valves, wherein gas outlets of respective outlet side switching valves communicate with a manifold, and another gas supply line at a position close to a mixed gas outlet of the manifold supplies a low flow rate gas, wherein an outlet side of the flow rate control device and an inlet side of the outlet side switching valve are hermetically connected via an outlet side connecting fitting of the flow rate control device and a mounting table having a gas passage, wherein a small hole portion is provided at a part of a flow passage at the outlet side connecting fitting and/or a flow passage, which makes the outlet side switching valve and a mixed gas flow passage in the manifold communicate with one another. | 01-31-2013 |
20130001453 | FLUID CONTROL DEVICE AND FLOW RATE CONTROL APPARATUS - This invention provides a fluid control device capable of making compact a fluid control device in which a valve and a limit switch are combined. A valve | 01-03-2013 |
20120319024 | FLUID CONTROL DEVICE - This invention provides a fluid control device which is capable of visually recognizing its opening and closing states with a simple configuration. The casing | 12-20-2012 |
20120298220 | PRESSURE TYPE FLOW RATE CONTROL DEVICE - A pressure type flow rate control device provides flow rate control for gas at 100-500° C. with an error not more than 1.0% F.S. The pressure type flow rate control device includes a valve body with a fluid passage, a valve portion interposed in the passage, a valve drive unit driving the valve portion to open/close the passage, a restriction mechanism on the downstream side of the valve portion in the passage, a temperature detector detecting gas temperature between the valve portion and restriction mechanism, a pressure detector detecting gas pressure between the valve portion and restriction mechanism, and an arithmetic control device controlling flow rate of gas in the restriction mechanism based on values detected by the temperature detector and the pressure detector, wherein the temperature detector is inserted in an attachment hole of the valve body at a position just above an outlet side fluid passage. | 11-29-2012 |
20120273061 | Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Rate Control Device - A piezoelectrically driven valve and a piezoelectrically driven fluid control device are provided that may control a fluid even if the temperature of the fluid is higher than an operating temperature range of a piezoelectric actuator. The piezoelectrically driven valve includes a valve element for opening and closing a fluid passage, a piezoelectric actuator for driving the valve element by utilizing extension of a piezoelectric element, and a radiation spacer that lifts and supports the piezoelectric actuator away from the fluid passage, and radiates heat that is transferred from fluid flowing in the fluid passage to the piezoelectric actuator, and preferably further includes a support cylinder that houses and supports both of the piezoelectric actuator and the radiation spacer, wherein the support cylinder is made of a material with the same thermal expansion coefficient as that of the radiation spacer, at least at a portion for housing the radiation spacer. | 11-01-2012 |
20120241023 | CONTROL VALVE DEVICE - A control valve device develops opening/closing accuracy of a valve assembly. The valve head | 09-27-2012 |
20120234406 | PRESSURE TYPE FLOW RATE CONTROL REFERENCE AND CORROSION RESISTANT PRESSURE TYPE FLOW RATE CONTROLLER USED FOR THE SAME - A pressure type flow rate control reference allows the performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. The pressure type flow rate control reference includes a pressure controller for adjusting the pressure of a calibration gas from a calibration gas supply source, a first volume provided on the downstream side of a pressure controller, a first connection mouth of an uncalibrated flow rate controller provided on the downstream side of the first volume, a reference pressure type flow rate controller connected to a second connection mouth on the downstream side of the uncalibrated flow rate controller, a second volume provided on the downstream side of a reference pressure type flow rate controller, and an evacuation device provided on the downstream side of the second volume. | 09-20-2012 |
20120230757 | BOLT-LOCKING APPARATUS, MOUNTING METHOD THEREOF AND MOUNTING JIG - A bolt-locking apparatus includes a plurality of fitting members | 09-13-2012 |
20120223265 | CAM CONTROL VALVE - A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder. | 09-06-2012 |
20120192964 | FLUID CONTROL APPARATUS - There is provided a fluid control apparatus with which assembling time is shortened by easily positioning the line support members, and the height of the portion supporting the fluid control devices is reduced. Each supporting frame member | 08-02-2012 |
20120082596 | Reactor for Moisture Generation - A reactor for moisture generation generates high-purity moisture at a catalytic reaction temperature that is lower than an ignition point of hydrogen gas and oxygen gas so hydrogen and oxygen gas are supplied into the reactor having a platinum catalyst layer to catalyze the reaction of the gases without combustion, wherein the reactor maintains high adhesion strength for a long time of the platinum catalyst layer to a barrier layer provided between the base material and the platinum catalyst layer. The reactor includes a reactor main body that has a gas inlet and a moisture outlet, and the Y | 04-05-2012 |
20120074339 | REGULATING VALVE DEVICE - [Problem] To provide a regulating valve device having a valve element opened or closed by a working fluid. | 03-29-2012 |
20110315905 | GASKET TYPE ORIFICE AND PRESSURE TYPE FLOW RATE CONTROL APPARATUS FOR WHICH THE ORIFICE IS EMPLOYED - A gasket type orifice includes a first orifice base having a through-type passage in a central area thereof, a second orifice base having in a central area thereof a through-type passage communicating with the passage of the first orifice base, and an orifice plate having an orifice hole formed in a central area thereof, wherein the orifice plate is mounted by insertion in an airtight manner between both orifice bases, and the gasket type orifice is installed in a fluid passage, in which the outer end faces of both orifice bases respectively serve as sealing faces, and an outer diameter of the second orifice base, located on the downstream side, is larger than an outer diameter of the first orifice base located on the upstream side, and an outer peripheral edge portion of an inner end face of the second orifice base serves as another sealing face. | 12-29-2011 |
20110144714 | BLOOD PRESSURE REGULATING SYSTEM BY SUBSTITUTING NATIVE BIOLOGICAL REGULATORY FUNCTION - A blood pressure regulating system uses a native regulation rule to estimate at least one nerve activity in response to blood pressure changes, comprising at least one blood pressure sensing means which senses blood pressure and outputs a input blood pressure signal, a calculating means which receives the input blood pressure signal, calculates a transfer function by computing a Fourier transform of a normal blood pressure signal and a normal sympathetic nerve activity from normal cardiovascular system, calculates an impulse response by computing an inverse Fourier transform of the transfer function, calculates a sympathetic nerve stimulation signal using a convolution integral between the input blood pressure signal and the impulse response, and outputs the sympathetic nerve stimulation signal, and a stimulating means which receives the sympathetic nerve stimulation signal, and stimulates the sympathetic nerve innervating vascular beds based on the sympathetic nerve stimulation signal such that blood pressure is regulated. | 06-16-2011 |
20110144710 | CARDIAC PACING SYSTEM BY SUBSTITUTING NATIVE BIOLOGICAL REGULATORY FUNCTION - The present invention provides a cardiac pacing system based on biological activities, comprising: a) at least one nerve activity sensing means which senses nerve activity of a cardiac sympathetic nerve and/or a vagal nerve, and outputs a plurality of input nerve activity signals; b) a calculating means which receives the input nerve activity signals, calculates a transfer function by computing a Fourier transform of normal nerve activity signals and a normal heart rate signal from normal cardiovascular system, calculates an impulse response by computing an inverse Fourier transform of the transfer function, calculates a plurality of pacing signals for control of a heart rate using a convolution integral between the input nerve activity signals and the impulse response, and outputs the pacing signals; and c) a pacing means which receives the pacing signals, and stimulates the heart based on the pacing signals such that heart rate is regulated. | 06-16-2011 |
20110139271 | AUTOMATIC PRESSURE REGULATOR FOR FLOW RATE REGULATOR - The invention prevents overshoot from occurring in flow rate on the output side of a flow rate regulator when output flow rate is changed or the gas type distributed is changed. Thus, an automatic pressure regulator is provided to supply gas pressure to a flow rate regulator that includes a piezoelectric element driving type pressure regulating valve, a control pressure detector provided on the output side of the pressure regulating valve, and a controller to which a detected value P | 06-16-2011 |
20110120566 | DISCONTINUOUS SWITCHING FLUID FLOW RATE CONTROL METHOD USING PRESSURE TYPE FLOW RATE CONTROL DEVICE - A fluid flow rate control method is provided that uses a flow rate range variable type pressure type flow rate control device provided with at least two or more parallel fluid passages disposed between the downstream side of a control valve of the control device and a fluid supply pipe passage, and orifices having different fluid flow rate characteristics are respectively interposed in parallel fluid passages to pass fluid in a first flow rate region through one orifice for flow rate control, and to pass fluid in a second flow rate region through at least another orifice for flow rate control. Flow rate characteristics of the respective orifices are selected so that a maximum controllable flow rate of fluid in the first flow rate region at low flow rate is smaller than 10% of a maximum controllable flow rate in the second flow rate region at high flow rate. | 05-26-2011 |
20110108138 | PRESSURE CONTROL VALVE DRIVING CIRCUIT FOR PRESSURE TYPE FLOW RATE CONTROL DEVICE WITH FLOW RATE SELF-DIAGNOSIS FUNCTION - A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage. | 05-12-2011 |
20110100483 | GAS SUPPLY APPARATUS EQUIPPED WITH VAPORIZER - An energy-saving, downsized gas supply apparatus equipped with a vaporizer is provided, wherein the gas supply apparatus is capable of stably and easily performing highly accurate gas flow rate control without requiring rigorous temperature control on the vaporizer side. The present invention pertains to a gas supply apparatus equipped with a vaporizer that includes (a) a liquid receiving tank; (b) a vaporizer that vaporizes liquid; (c) a high-temperature type pressure type flow rate control device that adjusts a flow rate of a vaporized gas; and (d) heating devices that heat the vaporizer, the high-temperature type pressure type flow rate control device, and desired portions of pipe passages connected to the vaporizer and the high-temperature type pressure type flow rate control device. | 05-05-2011 |
20110098767 | SYSTEM FOR AUTOMATICALLY MINIMIZING CARDIAC OXYGEN CONSUMPTION AND CARDIAC DISEASE TREATING SYSTEM USING THE SAME - [PROBLEMS] A system for automatically minimizing cardiac oxygen consumption that is capable of estimating a patient's amount of cardiac oxygen consumption with high accuracy and moreover capable of minimizing the amount of cardiac oxygen consumption and a cardiac disease treating system are provided. | 04-28-2011 |
20110094596 | Apparatus and method of dividing and supplying gas to a chamber from a gas supply apparatus equipped with flow-rate control system - The present-invention supplies a quantity Q of gas while dividing at flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller. A a total quantity Q=Q1+Q2 of gas is supplied into a chamber at flow rate Q1 and Q2 through shower plates fixed to ends of branch supply lines by providing open/close valves with a plurality of branch supply lines GL | 04-28-2011 |
20110042595 | PIEZOELECTRIC ELEMENT DRIVEN METAL DIAPHRAGM CONTROL VALVE - A control valve has a body that forms a valve chamber and a valve seat, a metal diaphragm installed inside the valve chamber and making contact with and departing from the valve seat, an actuator box fixed to the side of the body, a piezoelectric element installed inside the actuator box to thrust the metal diaphragm through mediation of a metal diaphragm presser by elongating downward when voltage is applied, a conical spring mechanism that absorbs elongation of the piezoelectric element at the time when the metal diaphragm makes contact with the valve seat and a prescribed thrust is applied to the valve seat and the like, and a preload mechanism that applies upward compressive force to the piezoelectric element all the time wherein the compressive force applied to the piezoelectric element is externally adjustable. | 02-24-2011 |
20110031745 | FLUID COUPLING AND RETAINER FOR FLUID COUPLING - An object of the present invention is to provide a fluid coupling, even if it has a large diameter, in which a coupling member can be readily retained by a retainer and the retainer can be readily attached to or detached from the coupling member, and a retainer for such a fluid coupling. A retainer | 02-10-2011 |
20100320408 | FLUID CONTROLLER - The present invention provides a fluid controller which enables fine adjustments of low flow rates and enables a user to set desired low flow rates. Low-flow-rate piston stop-position setting means | 12-23-2010 |
20100294964 | NORMALLY OPEN TYPE PIEZOELECTRIC ELEMENT DRIVEN METAL DIAPHRAGM CONTROL VALVE - A control valve has a body that forms a valve chamber and a valve seat, a metal diaphragm installed inside the valve chamber and making contact with and departing from the valve seat, an actuator box fixed to the side of the body, a piezoelectric element installed inside the actuator box to thrust the metal diaphragm through mediation of a metal diaphragm presser by elongating downward when voltage is applied, a conical spring mechanism that absorbs elongation of the piezoelectric element at the time when the metal diaphragm makes contact with the valve seat and a prescribed thrust is applied to the valve seat and the like, and a preload mechanism that applies upward compressive force to the piezoelectric element all the time wherein the compressive force applied to the piezoelectric element is externally adjustable. | 11-25-2010 |
20100276024 | SAFETY VALVE DEVICE, VALVE APPARATUS, HIGH-PRESSURE GAS TANK, AND VEHICLE - A safety valve device has a safety valve body configured to include a valve mechanism opened at a temperature of or over a preset reference temperature. The safety valve device also includes a gas flow path arranged to make a flow of hydrogen flowing out of a hydrogen tank via the safety valve body in a valve open position of the valve mechanism, and a discharge pipe configured to have a hydrogen discharge opening and arranged to discharge the hydrogen flowing through the gas flow path to the outside. The hydrogen discharge opening of the discharge pipe is formed to discharge the hydrogen in an oblique direction relative to a direction of an axial center of the gas flow path. The discharge pipe also has a groove formed to apply an input rotational force to the discharge pipe and thereby rotate the discharge pipe around the axial center of the gas flow path. In a typical application of a high-pressure gas tank with such a safety valve device mounted on a vehicle, this arrangement of the safety valve device enables the discharge direction of the high-pressure gas that is discharged from the safety valve device to be readily adjusted. | 11-04-2010 |
20100229976 | FLOW RATE RATIO VARIABLE TYPE FLUID SUPPLY APPARATUS - A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q | 09-16-2010 |
20100207044 | CAM VALVE - In a step motor driven cam valve a stem freely ascends and descends within a body having an in-flow passage, an out-flow passage, a valve chamber, and a valve seat. The stem is descended by an actuator, composed of a step motor and a cam mechanism located at a position above the stem, that changes a rotational motion of the step motor to a linear motion and transmits the linear motion to the stem. A diaphragm within a valve chamber or a valve body at a lower end part of the stem rests on the valve seat. A lift support mechanism that supports the actuator to freely ascend and descend is arranged at a bonnet that covers the valve chamber. A height fine-adjustment mechanism, arranged at the lift supporting mechanism, finely adjusts the height of the actuator relative to the stem so as to perform zero-point adjustment of the valve. | 08-19-2010 |
20100192854 | GAS SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTRUING FACILITIES - A gas supply system includes a main gas supply line; a vent gas supply line; a plurality of gas supply mechanisms disposed in middle of both gas supply lines; a pressure type flow-rate control system disposed on an inlet side of the main gas supply line so a flow of carrier gas is supplied to the main gas supply line; a pressure control system disposed on an inlet side of the vent gas supply line, a carrier gas having a predetermined pressure is supplied to the vent gas supply line while the pressure control system performs a pressure adjustment, a gas pressure of the main gas supply line detected downstream from an orifice of the pressure type flow-rate control system and a gas pressure of the vent gas supply line are compared, and the gas pressure of the vent gas supply line is adjusted so a difference therebetween becomes zero. | 08-05-2010 |
20100143239 | METHOD FOR PARALLEL OPERATION OF REACTORS THAT GENERATE MOISTURE - The method for parallel operation of moisture generating reactors according to the present invention operates so that an orifice, provided with an orifice hole having a predetermined opening diameter, is disposed on a mixed-gas inlet side of each of a plurality of moisture generating reactors connected in parallel with each other, and mixed gas G consisting of hydrogen and oxygen is supplied from a mixer to each of the moisture generating reactors through each orifice, and the flows of moisture generated by the moisture generating reactors are combined, and the resulting combined moisture is supplied to an apparatus that uses high-purity water. Thus, a need to increase the amount of high-purity water supply is met by allowing a plurality of moisture generating reactors to perform a parallel water generating operation by branching off a mixed gas consisting of H | 06-10-2010 |
20100139775 | FLOW RATE RANGE VARIABLE TYPE FLOW RATE CONTROL APPARATUS - A pressure type flow control device enabling a reduction in size and an installation cost by accurately controlling the flow of a fluid in a wide flow range. Specifically, the flow of the fluid flowing in an orifice ( | 06-10-2010 |
20100132819 | FLUID CONTROL APPARATUS - There is provided a fluid control apparatus which enables reducing widths of lines for further reducing space occupied by the apparatus. Support flow-channel blocks | 06-03-2010 |
20100132808 | FLUID CONTROL APPARATUS AND METHOD FOR ASSEMBLING THE SAME - There is provided a fluid control apparatus which can improve assembling operation efficiency. A screw insertion hole | 06-03-2010 |
20100127196 | PIEZOELECTRIC DRIVEN CONTROL VALVE - Stable flow control is made possible even under high-temperature environments by relieving tensional force applied to a piezoelectric element when a piezoelectric actuator is retracted. Thus, a piezoelectric driven control valve includes: a body having a valve seat; a metal diaphragm to contact with and separate from the valve seat; an actuator box supported ascendably and descendably on the body; a split base fixed to the body; a disc spring pressing and urging the actuator box downward to bring the metal diaphragm into contact with the valve seat; and a piezoelectric actuator housed inside the actuator box and that extends upward with application of voltage to press the actuator box upward against the elastic force of the disc spring, and a precompression mechanism, for applying a compression force constantly to piezoelectric elements in the piezoelectric actuator, provided between the split base and the piezoelectric actuator. | 05-27-2010 |
20100090151 | DIRECT TOUCH TYPE METAL DIAPHRAGM VALVE - A direct touch type metal diaphragm valve, wherein durability of the valve, that is to say, the ensured number of continuous open/close operations of the valve, is substantially increased under conditions that an appropriate flow rate coefficient Cv is maintained, and changes of the afore-mentioned Cv value over time are mitigated by means of restricting the deformation of the valve seat over time. The afore-mentioned metal diaphragm is formed in a round, reverse-dish shape by laminating a plural number of thin stainless steel plates and a thin Nickel.Cobalt alloy plate, and its center part is bulged upward, and the maximum valve stroke of the valve is regulated to be 55% to 70% of the distance of the maximum bulge height Δh of the afore-mentioned metal diaphragm. | 04-15-2010 |
20100078078 | Safety Valve - The present invention provides a safety valve with improved safety which is to be mounted to a container for releasing gas within the container if the temperature rises. A main body | 04-01-2010 |
20100012026 | EVAPORATION SUPPLY APPARATUS FOR RAW MATERIAL AND AUTOMATIC PRESSURE REGULATING DEVICE USED THEREWITH - An evaporation supply apparatus for raw material used in semiconductor manufacturing includes a source tank in which a raw material is pooled; a flow rate control device that supplies carrier gas at a regulated flow rate into the source tank; a primary piping path for feeding mixed gas G | 01-21-2010 |
20090326719 | METHOD FOR DETECTING ABNORMALITY IN FLUID SUPPLY LINE USING FLUID CONTROL APPARATUS WITH PRESSURE SENSOR - A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof. is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus. | 12-31-2009 |
20090302598 | Pipe Joint Locking Device - There is provided a pipe joint locking device which prevents accidental loosening of a pipe joint after tightening and with which a sealing property of a seal portion of the pipe joint is not impaired even if a force for rotating a pipe member acts on the pipe member. | 12-10-2009 |
20090292399 | METHOD FOR DETECTING MALFUNCTION OF VALVE ON THE DOWNSTREAM SIDE OF THROTTLE MECHANISM OF PRESSURE TYPE FLOW CONTROL APPARATUS - With a pressure type flow control apparatus, a valve on the downstream side of a throttle mechanism is released and a flow rate setting value Qe inputted to the pressure type flow control apparatus is changed to detect the magnitude ΔV of change of a flow rate output signal Qo from the pressure type flow control apparatus while the flow rate setting value Qe is changed, so that normal functioning of the releasing operations of the valve on the downstream side of the throttle mechanism is confirmed when the magnitude ΔV of change of the flow rate output signal Qo is above the predetermined value. If the releasing operations are malfunctioning, the magnitude ΔV of changes is found to be below the predetermined value. | 11-26-2009 |
20090277510 | Fluid control device - A fluid control device that does not require a replacement space worth the length even when a rod shaped cartridge heater is used, enables maintenance if the replacement space worth the width is formed, and suppresses increase in the installation area involved therewith is provided. | 11-12-2009 |
20090255587 | METHOD FOR WATER HAMMERLESS OPENING OF FLUID PASSAGE, AND METHOD FOR SUPPLYING CHEMICAL SOLUTIONS AND DEVICE FOR WATER HAMMERLESS OPENING FOR WHICH THE METHOD IS USED - The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc. | 10-15-2009 |
20090250126 | Fluid Control Device - There is provided a fluid control device having no dead volume. | 10-08-2009 |
20090212039 | Fluid Controlling Apparatus - There is provided a fluid controlling apparatus which can satisfactorily perform heating without enlarging an installation area. | 08-27-2009 |
20090183792 | Fluid Control Device - A fluid control device that can be miniaturized without reducing a bolt diameter and a path diameter is provided. | 07-23-2009 |
20090171507 | GASKET TYPE ORIFICE AND PRESSURE TYPE FLOW RATE CONTROL APPARATUS FOR WHICH THE ORIFICE IS EMPLOYED - An orifice changeable pressure type flow rate control apparatus comprises a valve body of a control valve for a pressure type flow rate control apparatus installed between an inlet side fitting block provided with a coupling part of a fluid supply pipe and an outlet side fitting block provided with a coupling part of a fluid takeout pipe; a fluid inlet side of the valve body and the inlet side fitting block, and a fluid outlet side of the valve body and the outlet side fitting block are detachably and hermitically connected respectively so a flow passage for gases through the control valve is formed; and, a gasket type orifice for a pressure type flow rate control apparatus is removably inserted between a gasket type orifice insertion hole provided on the outlet side of the valve body and a gasket type orifice insertion hole of the outlet side fitting block. | 07-02-2009 |
20090146089 | PRESSURE TYPE FLOW RATE CONTROL REFERENCE AND CORROSION RESISTANT PRESSURE TYPE FLOW RATE CONTROLLER USED FOR THE SAME - A pressure type flow rate control reference which allows performance of flow rate calibrations of a flow rate controller on all types of gases, including corrosive gases, at low costs, and also has excellent flow rate control accuracy. | 06-11-2009 |
20090020721 | Valve for Vacuum Exhaustion System - The invention provides a valve and a method of operating the valve that makes it possible to reduce the diameter of the vacuum exhaustion pipings to make the facility for the vacuum exhaustion system small, which results in lower costs and shortens vacuum exhaustion time, and also which can prevent corrosion, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of gas flowing through the pipings. In particular, in accordance with the present invention, an aluminum passivation is applied on the piping parts, i.e. the valve and others, that are used in the vacuum exhaustion system so as to inhibit gas decomposition caused by temperature rise at the time of baking so that components for reduction in the diameter size in the vacuum exhaustion system are provided. Thus, corrosion, cloggings and seat leakages caused by gas decomposition are prevented. | 01-22-2009 |
20090015010 | Method of making a fluid coupling - Each of ridges | 01-15-2009 |
20080319502 | CARDIAC PACING SYSTEM AND DISTRIBUTED CARDIAC PACING SYSTEM - A micro integrated cardiac pacemaker includes a control unit for outputting a control signal according to cardiograph information, heart stimulating means for stimulating heart tissue in response to the control signal, cardiograph information extracting means for extracting cardiograph information and outputting it to the control unit, and a power supply unit for supplying drive power. The power supply unit is a biological fuel cell that takes out electrons by oxidation of a biological fuel. The biological fuel cell includes an anode and a cathode. An oxidase of a biological fuel and a mediator are immobilized on the cathode. Blood and/or body fluid are used as an electrolytic solution, and a biological fuel and oxygen in the blood and/or the fluid are used. The biological fuel cell is attached to the end of a catheter and implanted into the heart, and the catheter is withdrawn, without incising the breast. | 12-25-2008 |
20080257415 | Method for Water Hammerless Opening of Fluid Passage,and Method for Supplying Chemical Solutions and Device for Water Hammerless Opening for Which the Method is Used - The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc. | 10-23-2008 |
20080241022 | Reactor for Generating Moisture and Moisture Generating and Feeding Apparatus for Which the Reactor is Employed - A reactor for generating moisture, with which hydrogen and oxygen fed into the reactor contact with a platinum coating catalyst layer to activate reactivity so that hydrogen and oxygen react under conditions of non-combustion, wherein the reactor includes a cooler comprising a heat dissipation body substrate in which a heater insertion hole is made in the center to fix to the outer surface of the reactor structural component on the outlet side and a cooler on the outlet side made up of a plural number of heat dissipation bodies installed vertically in parallel on the part excluding the area where the afore-mentioned heater insertion hole of the heat dissipation body substrate exists, and a part of the heater to heat the reactor is inserted in the heater insertion hole so as to fix to the outer surface of the reactor structural component on the outlet side. | 10-02-2008 |
20080215107 | CARDIAC PACING SYSTEM, BLOOD PRESSURE REGULATING SYSTEM, AND CARDIAC DISEASE TREATMENT SYSTEM BY SUBSTITUTING NATIVE BIOLOGICAL REGULATORY FUNCTION - A medical treating system based on biological activities characterized by biological activity sensing means for sensing biological activity information produced by biological activities and outputting a biological activity signal, calculating means for receiving, analyzing, and processing the biological activity signals from the biological activity sensing means, calculating an organism stimulation signal, and outputting the organism stimulation signal, and organism stimulating means for receiving the organism stimulation signal calculated by the calculating means and stimulating an organism according to the organism stimulation signal. A cardiac pacing system based on the treating system, a blood pressure regulating system, and a cardiac disease treating system are also disclosed. | 09-04-2008 |