20090084760 | METHOD FOR REMOVING MATERIAL FROM SOLIDS AND USE THEREOF - The invention relates to a method for material removal on solid bodies, in particular for microstructuring and cutting, by means of liquid jet-guided laser etching, the removed material just as the non-reacted etching components being recycled to a high degree. In this way, silicon with high purity can be recovered either in a polycrystalline manner or be deposited epitaxially on other substrates in the same process chain. | 04-02-2009 |