Fraunhofer-Gesellschaft Zur Forderung Der Andgewandten Forschung E.V.
Fraunhofer-Gesellschaft Zur Forderung Der Andgewandten Forschung E.V. Patent applications | ||
Patent application number | Title | Published |
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20110168547 | METHOD FOR PRODUCING A TRANSPARENT AND CONDUCTIVE METAL OXIDE LAYER BY HIGHLY IONIZED PULSED MAGNETRON SPUTTERING - A method for producing a transparent and conductive metal oxide layer on a substrate, includes atomizing at least one component of the metal oxide layer by highly ionized, high power pulsed magnetron sputtering to condense on the substrate. The pulses of the magnetron have a peak power density of more than 1.5 kW/cm | 07-14-2011 |