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FLOWMEMS, INC.
| FLOWMEMS, INC. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100078753 | Flow Sensor and Method of Fabrication - A method for forming a flow sensor having self-supported heat-carrying elements is disclosed. Self-supported heat-carrying elements are capable of operating with higher thermal efficiency, enabling lower power consumption and higher sensitivity, due to a lack of heat loss into a supporting membrane. Self-supported heat-carrying elements facilitate wider operating temperature range and compatibility with harsh media. | 04-01-2010 |