| FHR Anlagenbau GmbH Patent applications |
| Patent application number | Title | Published |
|---|
| 20110297077 | IN-LINE VACUUM COATING SYSTEM - An in-line vacuum coating system includes a vacuum chamber, a coating source and a substrate carrier for holding tubular substrates, the carrier being displaceable using the vacuum chamber. A sure method of simply and securely coupling a fixed rotational drive unit to a carrier that can be displaced at a constant rate of speed in an in-line vacuum coating system is accomplished by a fixed splined shaft rotatably installed and connectable to a rotational drive unit, and a gearwheel that can be engaged with the splined shaft and that is rotatably mounted on the carrier. The gearwheel is longitudinally displaceable to a predefined extent in spring-loaded fashion in a direction opposite to the direction of travel of the carrier. | 12-08-2011 |
| 20090236311 | Method and Apparatus for Structuring Components Made of a Material Composed of Silicon Oxide - A method and an apparatus for forming a structure on a component made of a material composed of silicon oxide, especially of silicate glass, glass ceramic or quartz, wherein in accordance with the process at least a first surface of the component a partial removal of the material by plasma etching takes place and during the plasma etching at least at the surface to be etched a substrate temperature is established which is substantially greater than 90° C. but less than the softening temperature of the material. The apparatus is equipped for this purpose with a heater for generating the substrate temperature. | 09-24-2009 |
