| Ferrotec Corporation Patent applications |
| Patent application number | Title | Published |
|---|
| 20120037504 | Multiply Divided Anode Wall Type Plasma Generating Apparatus and Plasma Processing Apparatus - An object of the present invention is to provide a multiply divided anode wall type plasma generation apparatus, wherein a short circuit between the cathode and the anode is not caused even if deposited matter adhering and depositing on the inner wall of the anode by diffusion plasma detach and fall. Also, an object is to provide a plasma processing apparatus using the same. | 02-16-2012 |
| 20120031337 | DIVIDED ANNULAR RIB TYPE PLASMA PROCESSING APPARATUS - A plasma stream-derived deposited matter formed on an annular rib for droplet capture in a plasma processing apparatus is prevented from falling into a plasma generation portion and causing a short circuit. The annular rib for the droplet capture is divided into multiple rib segments. Thus, from the beginning of the formation of the deposited matter on the annular rib due to the aggregation of the material in the plasma stream, it is possible to reduce the size of the deposited matter. By reducing the size of this deposited matter, when a piece of the deposited matter falls into the plasma generation portion, the piece of the deposited matter gets into a groove portion provided between a cathode and a wall surface of the plasma generation portion, thereby preventing the electrical short circuit between the cathode and the wall surface. | 02-09-2012 |
| 20110180403 | Insulator Interposed Type Plasma Processing Apparatus - Electrically charged droplets and neutral droplets mixed with plasma are removed with better efficiency, and an improvement in the surface treatment precision of film formation by high purity plasma is sought. | 07-28-2011 |
| 20110109227 | Target Exchange Type Plasma Generating Apparatus - The objective of the present invention is to provide a target exchange type plasma generating apparatus in which the positions of two targets can be adjusted independent of each other. A target exchanging mechanism ( | 05-12-2011 |
