| FERROTEC CERAMICS CORPORATION Patent applications |
| Patent application number | Title | Published |
|---|
| 20110151237 | SURFACE-TREATED CERAMIC MEMBER, METHOD FOR PRODUCING THE SAME AND VACUUM PROCESSING APPARATUS - Disclosed is a surface-treated ceramic member which has a coating film-formed surface comprising a ceramic sintered body with a porosity of 1% or less and a sol-gel coating film of a silicon alkoxide compound polymer formed on at least a part of a ceramic sintered body, wherein the coating film and the surface of the body are coexistent in the coating film-formed surface. Specifically the area of the sol-gel coating film accounts for 5 to 80% of the total area of the coating film-formed surface. The surface-treated ceramic member has excellent corrosion resistance and is free from scattering of particles. | 06-23-2011 |
| 20110129684 | YTTRIA SINTERED BODY AND COMPONENT USED FOR PLASMA PROCESSING APPARATUS - To provide a high-purity Yttria sintered bodies having a high strength, a low dielectric loss and high plasma corrosion resistance of halogen gas during wide range surface roughness (Ra). | 06-02-2011 |
