| EXCELLIANCE MOS CORPORATION Patent applications |
| Patent application number | Title | Published |
|---|
| 20110171799 | METHOD OF FORMING POWER MOSFET - A method of forming a power MOSFET is described. An epitaxial layer of first conductivity type is formed on a substrate of first conductivity type. A body layer of second conductivity type is formed in the epitaxial layer. A plurality of mask patterns are formed on the substrate. A plurality of trenches are formed in the body layer and the epitaxial layer between the mask patterns. An oxide layer is formed on surfaces of the trenches. A conductive layer is formed in the trenches. A trimming process is performed to the mask patterns to reduce the line width of each mask pattern. Two source regions of first conductivity type are formed in the body layer beside each trench by using the trimmed mask patterns as a mask. A plurality of dielectric patterns are formed on the conductive layer and between the trimmed mask patterns. The trimmed mask patterns are removed. | 07-14-2011 |
| 20110169076 | POWER MOSFET AND METHOD OF FORMING THE SAME - A power MOSFET is described. A trench is in a body layer and an epitaxial layer. An isolation structure is on the substrate at one side of the trench. An oxide layer is on the surface of the trench. A first conductive layer fills the trench and extends to the isolation structure. A dielectric layer is on the first conductive layer and isolation structure and has an opening exposing the first conductive layer. At least one source region is in the body layer at the other side of the trench. A second conductive layer is on the dielectric layer and electrically connected to the source region while electrically isolated from the first conductive layer by the dielectric layer. A third conductive layer is on the dielectric layer and electrically connected to the first conductive layer through the opening of the dielectric layer. The second and third conductive layers are separated. | 07-14-2011 |
| 20110037113 | SEMICONDUCTOR STRUTURE AND METHOD OF FORMING THE SAME - A semiconductor structure including a substrate, at least one power MOSFET, a floating diode or a body diode, and at least one Schottky diode is provided. The substrate has a first area, a second area and a third area. The second area is between the first area and the third area. The at least one power MOSFET is in the first area. The floating diode or the body diode is in the second area. The at least one Schottky diode is in the third area. Further, the contact plugs of the power MOSFET and the Schottky diode include tungsten and are electronically connected to each other. | 02-17-2011 |
