| EPICREW CORPORATION Patent applications |
| Patent application number | Title | Published |
|---|
| 20100027273 | COATINGS FOR REFLECTIVE SURFACES - Systems and methods of coatings for reflective surfaces. An optical system includes a reflective surface for reflecting optical energy and a transparent coating disposed upon the reflective surface. The coating may be characterized as more chemically inert than the reflective surface in an operating environment of the reflector. The coating may be characterized as harder than the reflective surface. The coating may be characterized as more refractory than the reflective surface. The coating may include diamond like carbon and/or other tetrahedrally bonded stable material, e.g., silicon carbide. | 02-04-2010 |
| 20090159005 | COATINGS FOR SEMICONDUCTOR PROCESSING EQUIPMENT - Systems and methods of coatings for semiconductor processing equipment. A semiconductor substrate processing system includes an enclosure for containing a semiconductor processing gas. The enclosure has an interior surface that is at least partially coated with a Silicon carbide coating to a desired thickness. The enclosure may be inlet piping for conveying the semiconductor processing gas to a processing chamber for processing the semiconductor substrate, a processing chamber and/or an exhaust flume for conveying used semiconductor processing gas away from a processing chamber. The interior surface may include additional coatings comprising Silicon and/or diamond like Carbon. | 06-25-2009 |
