EDWARDS LIMITED Patent applications |
Patent application number | Title | Published |
20160097398 | VACUUM PUMP - The present disclosure relates to a vacuum pump including a bearing and a lubricant supply system for lubricating the bearing. The lubricant supply system includes: a lubricant reservoir comprising a reservoir matrix for receiving a lubricant; a lubricant transfer arrangement in contact with the reservoir matrix for transferring lubricant from the reservoir matrix to the bearing, the lubricant reservoir including a reservoir enclosure for locating the reservoir matrix in position relative to the lubricant transfer arrangement; wherein the lubricant reservoir includes a plurality of contact regions at which the reservoir matrix is in contact with the reservoir enclosure for locating the reservoir matrix in position relative to the lubricant transfer arrangement and a plurality of spacing regions between respective contact regions at which the reservoir matrix is spaced apart from the reservoir enclosure for receiving gas and lubricant foam caused by outgassing in the lubricant in the reservoir matrix. | 04-07-2016 |
20150292494 | IMPROVEMENTS IN AND RELATING TO VACUUM CONDUITS - In situations where a vacuum system is suddenly overloaded, there is a risk of mechanical damage being sustained, for example, bearing damage, gear slippage or rotor and/or stator collisions. Sudden overloads can also lead to electrical damage, for example, over-currents or power surges. Therefore a pressure regulating apparatus is provided for use in a vacuum pumping system having an inlet, an outlet and a conduit interposed between, and in fluid communication with, the inlet and the outlet, wherein the cross-sectional area of the conduit is greater than that required to meet the conductance requirements of the inlet and the outlet. | 10-15-2015 |
20150275902 | VACUUM PUMP - The present invention relates to a vacuum pump | 10-01-2015 |
20150078043 | CONTROLLER FOR A VOLTAGE CONVERTER - In some examples, a control module for a voltage converter may have an input for connection to an AC supply having an operating voltage range. A first detector is provided for detecting the operating voltage range of the AC supply and generating a first control signal to identify the detected operating voltage range. A second detector is also provided for detecting the operating voltage range of the AC supply and generating a second control signal to identify the detected operating voltage range. The control module has one or more switches for selectively enabling and/or disabling a voltage multiplier in response to said first and second control signals. The present disclosure also relates to a method of controlling a voltage converter. | 03-19-2015 |
20150027373 | APPARATUS FOR TREATING A GAS STREAM - An apparatus for treating a gas stream. A plasma generator generates a plasma flare. A first inlet conveys the gas stream into the apparatus. A reaction chamber is located downstream of the plasma generator in which gas is treated. A second inlet receives a liquid into the apparatus for establishing a liquid weir over an interior surface of the reaction chamber for resisting accumulation of solid deposits on the interior surface. A weir guide has an outer annular surface for directing liquid over the interior surface and an inner annular surface in flow communication with the outer surface so that liquid flows form the outer surface to the inner surface to resist depositing on the inner surface. | 01-29-2015 |
20150027369 | Apparatus for Treating a Gas Stream - In an apparatus for treating a gas stream, a plasma generator comprises an electrode for energising a source gas to generate a plasma flare by application of a high voltage. An inlet allows the gas stream into the apparatus and directs it into the generated plasma. A scraper is fitted for reciprocating movement from a first position to a second position for scraping a surface to remove solid deposits accumulated on the surface. | 01-29-2015 |
20140334982 | Apparatus for Treating a Gas Stream - An apparatus for treating a gas stream includes a plasma abatement device that has a reaction chamber and a plasma torch for generating a plasma stream for injection into the chamber for treating the gas stream. A first inlet conveys a gas stream into the plasma abatement device for treatment, and a second inlet, in a normal condition of the apparatus, is in flow communication with a source of reagent for conveying a reagent into the plasma device for improving the efficiency of the treatment. In a back-up condition of the apparatus, the second inlet is in flow communication with a gas stream source for conveying a gas stream into the device for treatment. | 11-13-2014 |
20140286806 | MULTI-STAGE VACUUM PUMP - A multi-stage vacuum pump may include a sealing arrangement for sealing between the stator components of the pump. The end seals of the arrangement comprise an annular portion for sealing between end stator components and shell components and axial portions which extend from the annular portion and together with separate axial seals seal between the shell components. | 09-25-2014 |
20140209575 | APPARATUS FOR TREATING A GAS STREAM - In order to increase the operable range of a DC plasma torch in an abatement apparatus, the apparatus comprises a power control configured for controlling the power of the plasma torch by selective control of the plasma source gas flow regulator | 07-31-2014 |
20140182457 | SUB-ATMOSPHERIC PRESSURE GAS SCRUBBERS - In order to minimize the amount of contaminants that pass through a pump, or that are allowed to accumulate therein, a sub-atmospheric pressure gas scrubber suitable for use upstream of a vacuum pump is provided. The gas scrubber comprising a vessel and means for forming a spray of cleaning solvent within the vessel, the vessel comprising an inlet and an outlet for the gas to be cleaned at sub atmospheric pressure, the inlet and outlet being arranged to cause the gas to be cleaned to pass through the spray of cleaning solvent, the means for forming a spray comprising a cleaning solvent inlet connected to at least one spray nozzle and a cleaning solvent outlet through which used solvent can be pumped from the vessel using a pump, wherein the pump is arranged to recirculate the used solvent back to the cleaning solvent inlet. | 07-03-2014 |
20140154123 | Scroll Pump - The present invention relates to a scroll pump with two scrolls that are co-operable for pumping fluid from an inlet to an outlet on relative orbiting motion of the scrolls. Each scroll comprises a scroll base from which a scroll wall extends generally axially towards the base of the opposing scroll. A gas conduit having an inlet at a first location of the pumping channel and an outlet at a second location of the pumping channel allows over-compression at the first location of the pumping channel to be exhausted to the second location of the pumping channel. A one-way valve located in the gas conduit allows the passage of gas through the conduit from the conduit inlet to the conduit outlet when a predetermined pressure differential between the first and second locations of the pumping channel is generated during roughing when the scroll inlet is at or close to atmosphere. | 06-05-2014 |
20140127038 | Evacuating a Chamber - A method and apparatus for reducing undesirable noise generated by a vacuum pumping system. The vacuum system operates to reduce the pressure in a chamber to a first pressure value. The system then detects that the pressure at the vacuum pump system's inlet is about to change to a second higher pressure and, in response, the speed of a booster pump in the vacuum pump system is reduced below the rated speed for the pump. When the pressure at the vacuum pump's inlet is above the second pressure, the speed of the booster pump is increased to the rated speed. Thus, the booster pump is slowed down prior the pump system becoming exposed to a rapid increase in inlet pressure. | 05-08-2014 |
20140093412 | VACUUM PUMP STATORS AND VACUUM PUMPS - Combined booster and primary pump arrangements can be bulky and require separate supplies of purge gas and cooling water. In order to overcome this problem invention provides a vacuum pump in which two or more pumping mechanisms, i.e. the booster pump and main pump, are housed in the same stator. The invention further provides a vacuum pump stator comprising at least two operatively interconnected cavities, wherein at least two of the cavities each comprise at least one rotor-receiving portion shaped to receive two or more at least partially intermeshing rotors, and wherein an axis of a rotor-receiving portion of a first one of the cavities is offset with respect to an axis of a rotor-receiving portion of a second one of the cavities. | 04-03-2014 |
20140079617 | APPARATUS FOR TREATING A GAS STREAM - An apparatus for treating a gas stream comprises a nonthermal plasma reactor, for example a dielectric barrier discharge plasma reactor, containing a silicon-containing solid for reacting with a halogen-containing component of the gas stream to form a gaseous silicon halide. A sorbent bed of material chosen to react with the silicon halide to form inorganic halides is located downstream from the plasma reactor. A similar bed of material is located upstream from the plasma reactor to remove silicon halide and other acid gas components from the gas stream before it enters the plasma reactor. | 03-20-2014 |
20140079581 | ROTOR FOR PUMP - The present invention relates to a rotor for a vacuum pump having a roots pumping mechanism, the rotor comprising at least two hollow lobes, each lobe having an outer wall which defines a lobe profile, a hollow cavity generally inward of the outer wall, and at least one strengthening rib located in the cavity to resist stress on the lobes generated during rotation. | 03-20-2014 |
20140044582 | SCROLL COMPRESSOR HAVING ADJUSTABLE SPACERS - A scroll compressor | 02-13-2014 |
20140039655 | Apparatus and Method for Self-Tuning a Processing System - A method and apparatus is disclosed for automatically adjusting a recovery time for a processing system to recover from an idle mode to a normal operation mode in order to improve the efficiency of resource utilization, such as energy consumption. The processing system can be one that is used in semiconductor manufacturing, and include a process tool supported by an auxiliary device, such as a vacuum pump or abatement device. A number of parameters can be controlled to adjust the recovery time of the auxiliary device. One or more of those parameters can be increased or decreased based on comparison between a measured, actual recovery time and a predetermined, target recovery time, at the end of each recovery cycle. As such, the actual, measured recovery time can gradually converge with the predetermined, target recovery time, thereby optimizing the resource utilization of the processing system. | 02-06-2014 |
20140035412 | Magnetic Bearing Assembly - Stray magnetic fields created by non-symmetrical magnetisation of the permanent magnets in a rotating magnet array of a magnetic bearing assembly, when used in turbo molecular pumps, can cause significant problems to devices such as scanning electron microscopes. In order to minimise the stray fields, at least the dipole and quadrupole moments of each magnet in the array is first measured. The magnets in the array are then arranged relative to one another such that both the dipole and quadrupole moments are minimised, thus minimising the stray magnetic field when the magnet array rotates in the turbomolecular pump. | 02-06-2014 |
20140027411 | Plasma Torch - To lengthen the service period on DC plasma abatement devices a modified DC plasma torch is provided with an electrically conductive cathode and an electrically conductive anode spaced apart from one another to form a gap therebetween; a metal swirl bush at least partially located within the gap and comprising a channel adapted to permit, in use, a gas to flow through the gap; and a ceramic element interposed between any one or more of: the cathode and the swirl bush; and the anode and the swirl bush. | 01-30-2014 |
20140017109 | SCROLL COMPRESSOR - A scroll compressor | 01-16-2014 |
20140017062 | VACUUM PUMP WITH LONGITUDINAL AND ANNULAR SEALS - A multi-stage vacuum pump may include first and second half-shell components defining a plurality of pumping chambers and for assembly together along respective longitudinal extending faces; first and second end stator components for assembly at respective longitudinal seals for sealing between the first and second half-shell stator components when assembled together at the longitudinally extending faces; and annular seals for sealing between the first and second end stator components and the first and second half-shell stator components when assembled; wherein the longitudinal seals have end portions which abut against the annular seals for sealing therebetween and the first and second half-shell stator components have formations for resisting movement of the end portions away from the annular seals when the end portions are compressed between the first and second half-shell stator components. | 01-16-2014 |
20130340842 | Vacuum Pumping System - To overcome the problem associated with liquid or solid process debris from a vacuum process system falling into, and contaminating or damaging, a vacuum pumping arrangement used to evacuate the system, the inlet of the vacuum pumping arrangement is located lower than the outlet of the arrangement. This provides a net flow of gas pumped by the arrangement in a generally upwards direction thereby resisting the passage of contaminants into the arrangement. | 12-26-2013 |
20130294957 | Pump - A pump comprises a rotor arrangement and a stator arrangement. The stator arrangement comprises a first part made from a corrosive resistant material which defines a volume which in use is swept by the rotor arrangement for pumping fluid from an inlet to an outlet of the stator arrangement. A second part of the stator arrangement is made from a thermally conductive material which envelopes the first part so that heat generated in the first part can be transferred to the second part at the interface surface between the two parts. The second part has formed therein at least one duct | 11-07-2013 |
20130209272 | VACUUM PUMP CONTROL DEVICE AND VACUUM PUMP - An object of the present invention is to improve, using a simple configuration, heat dissipation of a regenerative resistor that is disposed in a vacuum pump control device (controller) connected to a vacuum pump. The regenerative resistor disposed in the vacuum pump control device is stored in an aluminum die-cast casing. More concretely, a housing of the vacuum pump control device is prepared by aluminum die casting (metal mold casting). A regenerative resistor storing portion (aluminum die-cast casing) provided with a hollow portion is provided on a top panel of the aluminum die cast, the hollow portion being designed to have a size accommodating the entire regenerative resistor. The regenerative resistor is fitted into the hollow portion, and an opening section of the hollow portion is sealed with an aluminum sheet of the same material as that of the casing. In this manner, the regenerative resistor can removably be stored in the aluminum die-cast casing. | 08-15-2013 |
20130209222 | PUMP - The present invention relates to a multi-stage vacuum pump having a plurality of compression stages | 08-15-2013 |
20130180596 | VACUUM SYSTEM - The present invention relates to a vacuum system | 07-18-2013 |
20130177453 | PUMPING ARRANGEMENT - A differentially pumped vacuum system includes first, second and third chambers, and a pumping arrangement for evacuating the chambers. The pumping arrangement includes a compound pump having a first inlet connected to an outlet from the first chamber, a second inlet connected to an outlet from the second chamber, a first pumping section and a second pumping section downstream from the first pumping section, the sections being arranged such that fluid entering the compound pump from the first inlet passes through the first and second pumping sections and fluid entering the compound pump from the second inlet passes through, of said sections, only the second section. The pumping arrangement further includes a booster pump connected to an outlet from the third chamber, and a backing pump connected to the exhaust from the booster pump. Fluid exhaust from the compound pump can be conveyed to either the booster pump or the backing pump as required. | 07-11-2013 |
20130164147 | VACUUM PUMPING - In order to prevent excessive motor loading or system overheating due to the accumulation of particulate or dust, from SACVD type CVD processes, in the running clearances of the vacuum pump a vacuum pumping arrangement is provided having a plurality of vacuum pumping stages and comprising a first pump inlet through which process fluid from the vacuum chamber can enter the pump and pass through each of the pumping sections towards a pump outlet, and a second pump inlet through which process fluid can enter the pump and pass through only one or more pumping stages downstream of the most upstream pumping stage, wherein the apparatus configured to conveying process fluid from the vacuum chamber to the first pump inlet for pumping during the second processing step and conveying process fluid from the vacuum chamber to the second pump inlet for pumping during the first processing step. | 06-27-2013 |
20130089419 | PUMP - The present invention relates to a pump ( | 04-11-2013 |
20130071274 | VACUUM PUMPING SYSTEM - The present invention relates to a vacuum pumping system ( | 03-21-2013 |
20130039791 | SCROLL PUMP - The present invention relates to a scroll pump ( | 02-14-2013 |
20130028757 | VACUUM PUMPING SYSTEM - The present invention relates to a vacuum pumping system ( | 01-31-2013 |
20130011288 | SCROLL COMPRESSOR - A scroll compressor ( | 01-10-2013 |
20120251368 | PUMP - The present invention provides a positive displacement dry pump comprising: a plurality of vacuum pumping stages comprising a respective plurality of pumping mechanisms driven by one or more drive shafts for pumping fluid in series through the pumping stages from a pump inlet at the high vacuum stage to a pump outlet at the low vacuum stage; a lubrication chamber housing a bearing assembly for supporting the drive shaft for rotational movement, the drive shaft extending from the high vacuum stage to the lubrication chamber through an opening of a head plate of the lubrication chamber; an inter-stage purge port through which gas can enter the pump at an inter-stage location downstream of the high vacuum stage and pass only through the or each vacuum pumping stage downstream of the inter-stage port; a lubrication chamber purge port located in the lubrication chamber through which purge gas can flow from a source of purge gas; wherein the inter-stage port is connected to the lubrication chamber for controlling the pressure of purge gas in the lubrication chamber thereby resisting the passage of pumped gases from the high vacuum chamber to the lubrication chamber through the opening of the head plate during use. | 10-04-2012 |
20120219407 | VACUUM PUMP - Vacuum pump for pumping gas from a process chamber, the pump comprising: a rotor supported for rotation in a pumping chamber by a drive shaft, the shaft extending through a shaft bore in a wall of the pumping chamber extending transversely to the drive shaft, and a seal arrangement provided between the shaft and the transverse wall for resisting the passage of gas through the shaft bore, wherein on rotation of the rotor gas is pumped from a low pressure region at an inlet of the pumping chamber to a high pressure region at an outlet of the pumping chamber, and wherein the rotor and the transverse wall are spaced apart by an axial clearance along which back leakage of gas can flow from the high pressure region to the low pressure region, and an additional leakage path for back leakage is formed spaced away from the seal arrangement along which gas can flow without contact with the seal arrangement so that the amount of gas which contacts the seal arrangement during use of the pump is reduced. | 08-30-2012 |
20120201696 | VACUUM PUMP - The present invention provides a vacuum pump ( | 08-09-2012 |
20120171033 | PUMPS - A pump shaft ( | 07-05-2012 |
20120168621 | MASS SPECTROMETER SYSTEM - The invention provides a mass spectrometer system ( | 07-05-2012 |
20120141311 | SCROLL PUMP - The present application relates to a scroll compressor comprising a scroll pumping mechanism which comprises an orbiting scroll ( | 06-07-2012 |
20120134863 | SCROLL PUMP - The present application relates to a scroll pump ( | 05-31-2012 |
20120134862 | SCROLL PUMP - The present invention relates to a scroll pump ( | 05-31-2012 |
20120132800 | VACUUM SYSTEM - The invention provides a vacuum system ( | 05-31-2012 |
20120100026 | SCROLL COMPRESSOR - A scroll compressor comprises two scrolls ( | 04-26-2012 |
20120090338 | METHOD OF TREATING AN EXHAUST GAS STREAM - The present invention provides a method of treating an exhaust gas stream | 04-19-2012 |
20120057995 | SIDE-CHANNEL COMPRESSOR WITH SYMMETRIC ROTOR DISC WHICH PUMPS IN PARALLEL - The present invention provides a pump comprising a regenerative pumping mechanism having a generally disc-shaped rotor mounted on an axial shaft for rotation relative to a stator. The rotor has first and second surfaces each having a series of shaped recesses formed in concentric circles thereon, and a stator channel formed in a surface of the stator which faces one of the rotor's first or second surfaces. Each of the concentric circles is aligned with a portion of a stator channel so as to form a section of a gas flow path extending between an inlet and an outlet of the pump, and the rotor divides the section of flow path into sub-sections such that gas can flow towards the outlet simultaneously along any sub-section, channel or rotor side. As a result, the gas being pumped flows in a parallel fashion along both surfaces of the rotor. Thus, this configuration can provide a pumping mechanism where gas pressures on either side of the rotor can be substantially equal or balanced. | 03-08-2012 |
20120045322 | VACUUM PUMP - A multi stage vacuum pump for pumping corrosive fluid with a first flow section of material less resistant to corrosion than the material of a second flow section downstream of the first flow section. | 02-23-2012 |
20110287373 | PILOT | 11-24-2011 |
20110286864 | MULTIPLE INLET VACUUM PUMPS - First and second pump stages provide a flow-path from an inlet to the outlet ( | 11-24-2011 |
20110200450 | APPARATUS AND METHOD FOR TUNING PUMP SPEED - An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range. | 08-18-2011 |
20110123355 | VACUUM PUMP - A vacuum pump surrounded by a ballistic blanket. | 05-26-2011 |
20110120184 | PURIFICATION OF A GAS STREAM - At least one gaseous impurity, for example silane, is removed by absorption from a feed gas stream, for example a gas stream comprising nitrogen and hydrogen, the gaseous impurity being less volatile than the feed gas stream. The absorption is effected by a sub-cooled absorbent at a first cryogenic temperature and a first pressure. The absorbent is typically propane. The absorption may be conducted in a liquid-vapour contact column ( | 05-26-2011 |
20100126605 | APPARATUS FOR CONVEYING A WASTE STREAM - Apparatus for conveying waste streams exhausted from first and second chambers is provided. The apparatus comprises first conduit means comprising an inlet for receiving a waste stream exhausted from the first chamber, and an outlet, and a second conduit means comprising an inlet for receiving a waste stream exhausted from a second chamber, and an outlet. The outlets of the first and second conduit means are connected together. The first conduit means comprises means for generating sonic choking of gas being conveyed towards the outlet of the first conduit means in order to inhibit migration of a component of the waste stream exhausted from the second chamber towards the first chamber. | 05-27-2010 |
20100119399 | VACUUM PUMP - A vacuum pump housing comprises first ( | 05-13-2010 |
20100071549 | METHOD OF RECYCLING HYDROGEN - A method is described for recycling hydrogen (H2) supplied to a chamber ( | 03-25-2010 |
20100068054 | VACUUM PUMP - A vacuum pump comprises a housing, a drive shaft supported by a beating arrangement for rotation relative to the housing about an axis, and a pumping mechanism comprising a stator component mounted on the housing and a disk-shaped rotor component mounted on the drive shaft axially proximate the stator component. The bearing arrangement comprises a bearing supported in both radial and axial directions by a resilient support, comprising inner and outer annular portions connected by a plurality of flexible members, so that there is a fixed relation between the inner race of the bearing and the outer portion of the resilient support to determine the axial clearance between the rotor and stator components of the pumping mechanism. | 03-18-2010 |
20090321271 | Method of Pumping Combustible Gas - A system for pumping a gas stream containing a combustible gas comprises a solid oxide ionic conducting membrane ( | 12-31-2009 |
20090304524 | Method of Operating a Pumping System - A pumping system has a motor ( | 12-10-2009 |
20090269231 | Method of Pumping Gas - A method of pumping a gas stream containing a condensable species and a light gas and an apparatus therefore, the method comprising the steps of conveying the gas stream to a multistage vacuum pump comprising an inlet stage and an exhaust stage downstream from the inlet stage, and adding to the gas stream upstream of or at the inlet stage a purge gas heavier than said light gas to both inhibit migration of the light gas from the exhaust stage towards the inlet stage and to inhibit condensation of the condensable species within the pump. | 10-29-2009 |