ECOSOLIFER AG
ECOSOLIFER AG Patent applications | ||
Patent application number | Title | Published |
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20160115592 | GAS DISTRIBUTION SYSTEM FOR A REACTION CHAMBER - A gas distribution system of a reaction chamber wherein the reaction chamber has a body defining a closed inner volume, in the inner volume rectangular substrates are arranged spaced apart from each other and electrodes suitable for providing high-frequency electromagnetic field are disposed between the substrates; the spaces between the substrates provide flow channels for the laminar flow of reaction gases between two opposite sides of the chamber, and the gas distribution system comprises an inlet channel, a gas distribution area and a distributing plate on one side of the chamber, and a collecting plate, a collection area and an outlet channel on the other side, and in the gas distribution system between the inlet channel and the distribution area a mixing chamber is provided, which is separated from the distribution area by a wall portion and provides better mixing and homogenization of reaction gases. | 04-28-2016 |
20150122178 | REACTION CHAMBER FOR DEPOSITION OF A SEMICONDUTOR LAYER ON THE PLURALITY SUBSTRATES IN BATCHES - A reaction chamber for deposition of a semiconductor layer or layer structure on the plurality of substrate surfaces in substrate batches wherein the chamber comprises a body with an inner volume and a closing bottom lid, in the inner volume rectangular substrates are aranged spaced apart from each other and electrodes suitable for providing high-frequency electromagnetic field are disposed between the substrates; and the space presenting between the surfaces to be deposited provide flow channels making available the laminar flow of reaction gases between two opposite sides of the chamber, and the chamber is characterized in that the closing bottom lid can be opened in the vertical up-and-down direction, and the lid comprises supporting frames for holding the substrates from the bottom and along the side edges, and the supporting frames are provided with adequate recesses to enable them to perform this supporting function. | 05-07-2015 |