CSMC TECHNOLOGIES FAB2 CO., LTD.
|CSMC TECHNOLOGIES FAB2 CO., LTD. Patent applications|
|Patent application number||Title||Published|
|20140167126||SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME - Provided are a semiconductor device and a method of manufacturing the same. The semiconductor device includes a substrate and a PIP capacitor located. The PIP capacitor includes a first polysilicon layer, a metallic silicide layer, a protective layer, a dielectric layer, and a second polysilicon layer, which have a lower conductive plate pattern and are successively arranged. The method includes: providing a substrate; successively forming a first polysilicon layer, a metallic silicide, and a protective layer on the substrate; transferring a lower conductive plate pattern into the first polysilicon layer, the metallic silicide layer, and the protective layer, thus forming the first polysilicon layer, the metallic silicide layer, and the protective layer having the lower conductive plate pattern; successively forming a dielectric layer and a second polysilicon layer having a lower conductive plate pattern on the protective layer. The capacitance and reliability of the PIP capacitor are improved.||06-19-2014|
|20140167045||TEST PATTERN FOR TRENCH POLY OVER-ETCHED STEP AND FORMATION METHOD THEREOF - A test pattern for testing a trench POLY over-etched step is provided. The test pattern is a trench (||06-19-2014|
|20140154878||NOR FLASH DEVICE MANUFACTURING METHOD - An embodiment of a NOR Flash device manufacturing method is disclosed, which includes: providing a substrate having a first polycrystalline silicon layer disposed thereon; forming a first hard mask layer on the first polycrystalline silicon layer; etching the first hard mask layer to form a first opening, and cleaning a gas pipeline connected to an etching cavity before etching the first hard mask layer; forming a second hard mask layer on the first hard mask layer, and the second hard mask layer covers the bottom and side wall of the first opening; etching the second hard mask layer to form a second opening, the width of the second opening is smaller than the width of the first opening; etching the first polycrystalline silicon, forming a floating gate. The NOR Flash device manufacturing method of the present invention improves the yield of the NOR Flash device.||06-05-2014|
|20140151815||READ-ONLY MEMORY AND ITS MANUFACTURING METHOD - A read-only memory includes a plurality of storage units arranged in an array. The read-only memory includes two kinds of storage units with different structures, the two kinds of storage units with different structures are a first MOS transistor and a second MOS transistor. A source and a drain of the first MOS transistor have the same type, a source and a drain of the second MOS transistor have inverse type. These two kinds of MOS transistors can be used to store binary 0 and 1 respectively. In the manufacturing method of the read-only memory, the same type of drain and source can be manufactured simultaneously, no extra mask plate is needed, so the extra mask plate of a conventional read-only memory can be saved.||06-05-2014|
|20130196489||METHOD FOR MANUFACTURING DEEP-TRENCH SUPER PN JUNCTIONS - The present invention provides a method for manufacturing a deep-trench super PN junction. The method includes: a deposition step for forming an epitaxial layer on a substrate; forming a first dielectric layer and a second dielectric layer in sequence on the epitaxial layer; forming deep trenches in the epitaxial layer; completely filling the deep trenches with an epitaxial material and the epitaxial material is beyond the second dielectric layer; filling the entire surface of the second dielectric layer and the epitaxial layer such as Si using a third dielectric to from a surface filling layer with a predetermined height; etching back on the surface filling layer to the interface of the first dielectric layer and the epitaxial layer; and a removing step for removing the first dielectric layer, the second dielectric layer and the surface filling layer to planarize Si epitaxial material.||08-01-2013|
|20130187257||Semiconductor device and method for manufacturing the same - A method is disclosed for manufacturing a semiconductor device. The method includes providing a substrate and forming a well region in the substrate by an ion implantation. The method also includes forming, by rapid thermal oxidation and on the substrate having the well region, an oxide layer for repairing the substrate damaged by the ion implantation. Further, the method includes removing the oxide layer and forming a gate oxide layer on the repaired substrate having the well region.||07-25-2013|
|20130113052||METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME - A Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET) is disclosed. The MOSFET includes a substrate, a well region formed in the substrate, a shallow channel layer, a channel, a gate oxide layer, a gate region, a source region, and a drain region. The shallow channel layer is formed on a portion of the well region and includes a first shallow channel region and a second shallow channel region. The channel is arranged between the first shallow channel region and the second shallow channel region and connects the first shallow channel region and the second shallow channel region. Further, the gate oxide layer is formed on a portion of the well region between the first shallow channel region and the second shallow channel region and includes a first gate oxide region and a second gate oxide region arranged on different sides of the channel. The gate region is formed on the channel and the gate oxide layer; the source region is formed in the first shallow channel region and vertically extends into the well region under the first shallow channel region; and the drain region is formed in the second shallow channel region and vertically extends into the well region under the second shallow channel region.||05-09-2013|
|20130099755||LITHIUM BATTERY PROTECTION CIRCUITRY - A lithium battery protection circuit coupled to a lithium battery is provided. The lithium battery protection circuit includes an over-charge protection circuit and a logic circuit coupled to over-charge protection circuit. The logic circuit has a first logic output and a second logic output. The lithium battery protection circuit also includes a level shift circuit coupled to the logic circuit through the first logic output and the second logic output, and the level shift circuit is configured to convert the first logic output and the second logic output to high voltage levels in an over-charge protection state. Further, the lithium battery protection circuit includes a substrate switching circuit coupled to the level shift circuit and a power transistor coupled between a negative end of the lithium battery and an external circuit negative electrode. The level shift circuit includes a first inverter coupled to the second logic output, a plurality of PMOS transistors, at least one of which has high source-drain voltage and low gate-source voltage, and a plurality of NMOS transistors, at least one of which is a low-voltage NMOS transistor.||04-25-2013|
|20130037878||VDMOS DEVICE AND METHOD FOR FABRICATING THE SAME - A method for fabricating VDMOS devices includes providing a semiconductor substrate; forming a first N-type epitaxial layer on the semiconductor substrate; forming a hard mask layer with an opening on the first N-type epitaxial layer; etching the first N-type epitaxial layer along the opening until the semiconductor substrate is exposed, to form P-type barrier figures; forming a P-type barrier layer in the P-type barrier figures, the P-type barrier layer having a same thickness as that of the first N-type epitaxial layer; removing the hard mask layer; forming a second N-type epitaxial layer on the first N-type epitaxial layer and the P-type barrier layer; forming a gate on the second N-type epitaxial layer; forming a source in the second N-type epitaxial layer on both side of the gate; and forming a drain on the back of the semiconductor substrate relative to the gate and the source.||02-14-2013|
|20120178230||METHOD FOR FABRICATING TRENCH DMOS TRANSISTOR - A method for fabricating trench DMOS transistor includes: forming an oxide layer and a barrier layer with photolithography layout sequentially on a semiconductor substrate; etching the oxide layer and the semiconductor substrate with the barrier layer as a mask to form a trench; forming a gate oxide layer on the inner wall of the trench; forming a polysilicon layer on the barrier layer, filling up the trench; etching back the polysilicon layer with the barrier layer mask to remove the polysilicon layer on the barrier layer to form a trench gate; removing the barrier layer and the oxide layer; implanting ions into the semiconductor substrate on both sides of the trench gate to form a diffusion layer; coating a photoresist layer on the diffusion layer and defining a source/drain layout thereon; implanting ions into the diffusion layer based on the source/drain layout with the photoresist layer mask to form the source/drain; forming sidewalls on both the sides of the trench gate after removing the photoresist layer; and forming a metal silicide layer on the diffusion layer and the trench gate. Effective result of the present invention is achieved with lower cost and improved efficiency of fabrication.||07-12-2012|
Patent applications by CSMC TECHNOLOGIES FAB2 CO., LTD.