| 20110271764 | Capacitive Pressure Sensor With Vertical Electrical Feedthroughs And Method To Make The Same - A sensing device capable of detecting pressure using micro-electro-mechanical system (“MEMS”) capacitive pressure sensor with vertical electric feed-through is disclosed. The sensing device includes a first sensing element, a second sensing element, and a sensing circuit. In one embodiment, the first sensing element is disposed over a semiconductor die and is configured to generate a first sensing signal upon detecting pressure. The second sensing element is also disposed over the semiconductor die adjacent to the first sensing element, and is configured to generate a second sensing signal upon sensing ambient conditions. The sensing circuit is capable of generating a pressure sensing signal in response to the first sensing signal and the second sensing signal. | 11-10-2011 |
