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Comm. a l'energie atomique et aux energies altern.
| Comm. a l'energie atomique et aux energies altern. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20110219875 | FORCE SENSOR WITH REDUCED NOISE - A MEMS or NEMS device for detecting a force following a given direction, comprising a support ( | 09-15-2011 |