| CKD CORPORATION Patent applications |
| Patent application number | Title | Published |
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| 20120097881 | VALVE SEAT STRUCTURE OF FLUID CONTROL VALVE - In a valve seat structure of a fluid control valve comprising a valve element, a body formed with an inlet port and an outlet port, and a valve seat member provided in the body, the fluid control valve being configured to bring the valve element into or out of contact with the valve seat member to control the flow of a fluid, the valve seat member is formed in a ring shape and includes a valve seat portion with which the valve element will come into our out of contact. Assuming that a thickness of the valve seat portion in a radial direction of the valve seat member is a first thickness t | 04-26-2012 |
| 20120024989 | LIQUID EJECTING APPARATUS - A liquid ejecting apparatus having a storage portion ( | 02-02-2012 |
| 20110285125 | COUPLING APPARATUS FOR CHEMICAL FLUID FLOW CHANNEL - This invention provides a chemical fluid flow channel coupling apparatus that couples and decouples chemical fluid flow channels. The coupling apparatus includes a first coupling unit; and a second coupling unit. The first coupling unit includes a first chemical fluid valve member chamber and a first valve member configured to open and close a first chemical fluid opening communicated with the first chemical fluid flow channel; and a purging fluid supply control valve configured to open and close the purging fluid supply flow channel. The second coupling unit includes a second chemical fluid valve member chamber, and a second valve member configured to open and close a second chemical fluid opening connected to the second chemical fluid flow channel; and a purging fluid discharge control valve. | 11-24-2011 |
| 20110277325 | Passage block and manufacturing method thereof - A passage block formed with a passage connectable to a fluid control device comprises a first block member formed with a plurality of first-coupling-face apertures, a second block member formed with a plurality of second-coupling-face apertures in correspondence with the first-bonding-apertures, a first passage-end contact portion formed around each of the first-coupling-face apertures, a second passage-end contact portion formed around each of the second-coupling-face apertures, and a passage-end contact section provided in such a manner that a lower surface of the first block member and an upper surface of the second block member are arranged to face each other so that the first and second passage-end contact portions contact with each other, and the first and second block members are heated under pressure to diffusion-bond the first and second passage-end contact portions to each other. | 11-17-2011 |
| 20110249096 | THREE-DIMENSIONAL MEASURING DEVICE AND BOARD INSPECTION DEVICE - A board inspection device includes an irradiation device for irradiating light on a printed circuit board, a CCD camera for imaging the irradiated part of the circuit board. First image processing is performed for a first exposure time such that an inspection target region is free of brightness saturation, and second image processing is performed using a second exposure time corresponding to the insufficiency of the first exposure time relative to a certain exposure time appropriate for measurement of a measurement standard region. Thereafter, image data for three-dimensional measurement is prepared for the inspection target region using the value of image data obtained by the first image processing, and image data for three-dimensional measurement is prepared for the measurement standard region using a value obtained by summing the image data value acquired by the second image processing and the image data value acquired by the first image processing. | 10-13-2011 |
| 20110240672 | CHEMICAL SUPPLY SYSTEM - This invention provides a chemical supply system for supplying chemical solution from a chemical tank. The chemical supply system includes a chemical supply pump, a pressure adjuster configured to suction the chemical solution into the pump chamber by setting the pressure of working gas to a suction pressure, a switching controller configured to switch the suction-side opening-closing valve to the open state for starting to fill the pump chamber with the chemical solution, a pressure detector configured to detect at least one of a gas pressure in a space connected to the working chamber and a gas pressure in the working chamber when the suction-side opening-closing valve is switched to the open state and starts an inflow of the chemical solution to the pump chamber, and a suction controller configured to control the suction pressure applied to the working chamber by the pressure adjuster, based on a detection result of the pressure detector. | 10-06-2011 |
| 20110233923 | CONNECTED STRUCTURE OF VACUUM DOUBLE PIPE, VACUUM DOUBLE PIPE, AND JOINT OF VACUUM DOUBLE PIPE - This invention provides a connected structure of vacuum double pipes. The connected structure comprises a plurality of vacuum double pipes and a joint configured to connect the plurality of vacuum double pipes. The vacuum passage is open at both end in an extension direction of the inner pipe and sealed between the both ends. The joint includes an inner pipe joint unit having inner pipe connectors and an outer pipe joint unit having outer pipe connectors. The evacuation passage is sealed between the outer pipe connectors that connect the vacuum passages of the outer pipes. | 09-29-2011 |
| 20110219890 | SAMPLE INJECTOR - This invention provides a sample injector for injecting a fixed amount of a sample into a mobile phase medium and discharging the mobile phase medium with the sample. The sample injector includes a first member having a medium passage for supplying the mobile phase medium and a sample passage for supplying the sample and a second member having a discharge passage for discharging the mobile phase medium with the sample to an outside of the injector. The second member is provided in contact with the first member. The first member and the second member are configured to move to a sample charging position and a sample injection position. The sample charging position is for the sample chamber to connect with the sample passage. The sample injection position is for the sample chamber to connect with the medium passage and the discharge passage. | 09-15-2011 |
| 20110216186 | SOLDER PRINTING INSPECTION APPARATUS AND SOLDER PRINTING SYSTEM - A solder printing inspection apparatus for inspection of solder printed on a circuit board has a multiplicity of lands for mounting of electronic components. The apparatus includes an irradiation unit for irradiating a light on the circuit board, an imaging unit for imaging the circuit board irradiated by the light, a solder bridge detection unit for detecting a solder bridge connecting two of the lands based on an image data imaged by the imaging unit, a distance calculation unit for calculating a bridge distance as distance between two lands contacting the solder bridge or solder bridging regions or solder detection frames corresponding to the two lands contacting the solder bridge, and a distance determination unit for determination of whether or not the bridge distance is within a permissible range. | 09-08-2011 |
| 20110198843 | PORT STRUCTURE AND FLUID DEVICE INCLUDING THE PORT STRUCTURE - A port structure for connecting a resin tube to a port part includes a tube insertion hole in which the tube is inserted, a female screw portion provided in an opening of the tube insertion hole, and a tapered hole provided on a inward side of the female screw portion and formed with a taper with a diameter decreasing from the female screw side to the rear end. When a nut is screwed into the female screw portion to press the ferrule against the tapered hole, a repulsive force of the tapered hole acts on a tapered surface of the ferrule, elastically deforming the ferrule radially inward so that the ferrule bites into the tube and is pressed against the tapered hole to provide a seal. | 08-18-2011 |
| 20110180154 | ASSEMBLING STRUCTURE OF ACTUATOR PART OF FLUID CONTROL VALVE, AND FLUID CONTROL VALVE FORMED WITH THE STRUCTURE - In an assembling structure of an actuator part of a chemical liquid valve, a cover is formed with a protrusion extending in a radial direction of a valve element, and a cylinder is formed with an engagement part engageable with the protrusion. A cover is placed to hold a spring in a compressed state in the cylinder and make a cap part cover an opening of the cylinder. The protrusion and the engagement part are engaged with each other to integrally connect the cylinder and the cover without separating from each other. | 07-28-2011 |
| 20110174380 | VACUUM CONTROL SYSTEM AND VACUUM CONTROL METHOD - This invention provides a vacuum control system using a vacuum pump to control a vacuum pressure and a flow of a processing gas in a vacuum chamber. The vacuum control system includes: a plurality of vacuum control valves, each of the valves being connected between each of a plurality of gas discharge ports and the vacuum pump; a pressure measurement unit configured to measure the vacuum pressure of the processing gas supplied to the object; and a controller configured to manipulate respective openings of the valves in accordance with the measured vacuum pressure. | 07-21-2011 |
| 20110168279 | FLOW RATE CONTROLLER AND PROPORTIONAL ELECTROMAGNETIC VALVE - A flow rate controller is arranged such that a control circuit controls a proportional electromagnetic valve so that a flow rate detected by a flow rate sensor reaches a target flow rate. The proportional electromagnetic valve includes a coil supported in a holder, a bobbin and a fixed core, a valve element and a plate spring placed on a movable core, the valve seat, lead-in path, lead-out path, and orifice being formed in a body. The movable core is displaced by balance between an attractive force of the fixed core generated by excitation of the coil and an urging force of the plate spring, thereby adjusting the position of the valve element with respect to the valve seat to adjust the flow rate of a fluid. The orifice has an inside diameter set to a value of “φ1 mm or more” and an axial length set to a value to have a ratio of “from 0.1 to 0.6 inclusive” to the inside diameter. The lead-out path has an inside diameter set to be larger than the inside diameter of the orifice. | 07-14-2011 |
| 20110073197 | COMBINED VALVE - A combined valve comprising a pilot mechanism ( | 03-31-2011 |
| 20100320699 | SEAL STRUCTURE FOR CONNECTION SECTIONS AND SEAL MEMBER USED FOR THE SAME - A seal structure for connection sections, which facilitates installation and removal of a seal member from the connection sections. The seal member is placed in the connection sections between a first part and a second part. A first groove-ridge section is formed at the connection section of the first part, and a second groove-ridge section is formed at the connection section of the second part. The seal member has, on one face, a first fitting section fitting to the first groove-ridge section, and also has, on the other face, a second fitting section fitting to the second groove-ridge section. Press-fitting interferences in the wall-thickness direction are provided at the first and second fitting sections. The seal member has an extended section protruding radially outward from an annular body section where the first and second fitting sections are provided. The extended section protrudes to a position outside the connection sections of the first and second parts. | 12-23-2010 |
| 20100229984 | ROTARY SWITCHING VALVE - A rotary valve ( | 09-16-2010 |
| 20100194855 | THREE-DIMENSIONAL MEASURING DEVICE AND BOARD INSPECTION DEVICE - A three-dimensional measuring device includes an irradiation means capable of irradiating a striped light pattern used for a spatial encoding method and a striped light pattern used for a phase shift method on a measurement object part on a board main body, an imaging means capable of imaging a measurement object part irradiated by the light pattern, an image control means for controlling imaging by the imaging means, a first calculation means for calculating a height of the measurement object part according to the phase shift method based on a multiplicity of image data imaged by the imaging means, and a second calculation means capable of using the spatial encoding method to identify a line corresponding to the measurement object part from among the image data at a time of calculation by the first calculation means by the phase shift method based on the image data. | 08-05-2010 |
| 20100183194 | THREE-DIMENSIONAL MEASURING DEVICE - A three-dimensional measuring device includes an irradiation device configured to irradiate and switch among a multiplicity of light patterns having different periods and having a striped light intensity distribution on at least a measurement object, a camera having an imaging element capable of imaging reflected light from the measurement object irradiated by the light pattern, a rack configured to cause relative change in positional relationship between the imaging element and the measurement object, and a control device configured to perform three-dimensional measurements based on image data imaged by the camera. The control device performs the three-dimensional measurements by performing a phase shift method calculation of height data as a first height data for each pixel unit of image data based on a multiply phase-shifted image data obtained by irradiating on a first position a multiply phase-shifted first light pattern having a first period. | 07-22-2010 |
| 20100177192 | THREE-DIMENSIONAL MEASURING DEVICE - A three-dimensional measuring device has an irradiation device that irradiates a light pattern having a striped light intensity distribution on a measurement object, an imaging device that images reflected light from the measurement object irradiated by the light pattern to obtain image data, an image processing device that performs measurement of height at various coordinate positions on the measurement object based on the image data imaged by the imaging device, and a correction calculation device that corrects of a distortion that occurs due to a field angle of a lens of the imaging device relative to height data and coordinate data of an measurement object point on the measurement object measured by the image processing device, by correction based on at least a height data of the imaging device and an irradiation angle data of the pattern light irradiated on the measurement object. | 07-15-2010 |
| 20100155641 | Cover-equipped manual valve - A cover-equipped manual valve having a ratchet mechanism for preventing rotation of a knob, comprising: a rod formed with an external thread portion on an outer periphery thereof, the rod being unconnected to the knob and held against rotation; a sliding nut of a cylindrical shape, the sliding nut being rotatably held by a body and internally formed with an internal thread portion threadedly engaged with the external thread portion of the rod; an engagement member fixed to the knob, the engagement member being elastically deformable to be engaged with the sliding nut and to be disengaged from the sliding nut when larger torque than a predetermined value is applied to the engagement member; and a knob cover of a hollow shape for covering the knob. | 06-24-2010 |
| 20100123092 | FLUID CONTROL VALVE - A fluid control valve comprises a ferromagnetic material portion that is formed on the spool so as to extend in the axial direction of the spool, permanent magnets that are arranged opposite each other having the middle portion therebetween in a direction orthogonal to the axial direction of the spool, form between themselves oppositely oriented magnetic fields aligned in the axial direction, and which are formed to be longer than the middle portion in the axial direction of the spool, and a coil that is arranged in a direction orthogonal to the axial direction of the spool with respect to the permanent magnets and generates a magnetic field that penetrates the opposing permanent magnets due to the conduction of electricity. | 05-20-2010 |
| 20100116484 | TEMPERATURE CONTROL DEVICE - The temperature control device comprises a heating pathway that heats and circulates the fluid in the temperature adjustment unit, a cooling pathway that cools and circulates the fluid in the temperature adjustment unit, a bypass pathway that circulates the fluid in the temperature adjustment unit without passing the fluid through the heating pathway and the cooling pathway, an adjustment means that adjusts a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit, and a flow means that flows the fluid in order to circulate the fluid, and wherein a heating unit for heating the fluid is arranged in the heating pathway, and the flow means is disposed downstream from the heating unit along at least one of the pathways for circulating the fluid. | 05-13-2010 |
| 20100090137 | FLOW RATE CONTROL DEVICE - The flow rate control device is equipped with a pilot regulator that applies operating pressure by using air supplied to one surface of a diaphragm provided in the regulator and adjusts the flow rate of a chemical liquid contacting the opposite surface, and with an electropneumatic regulator that controls supply and discharge of air to adjust the operating pressure for the pilot regulator. The flow rate control device is equipped with an air passage that connects and passes air between the pilot regulator and electropneumatic regulator, and an orifice that enables adjustment of operating pressure by the electropneumatic regulator while discharging air from the air passage. | 04-15-2010 |
| 20090250561 | Fluid device mounting structure - A fluid device mounting structure is provided for installing a plurality of fluid devices on a support assembly. The support assembly includes a support member for supporting connecting portions of the fluid devices by the support assembly, so that the fluid devices are freely disposed in three dimensions. | 10-08-2009 |
| 20090235993 | FLOW RATE CONTROL DEVICE - A flow rate control device comprises a regulator that adjusts the pressure of a fluid to be supplied, a plurality of narrowed pathways arranged in parallel on the downstream side of the regulator, and an open/close section that switches a predetermined narrowed pathway amongst the plurality of narrowed pathways between an open position and a closed position. One of the pathways can be an open narrowed pathway arranged on the downstream side of the regulator and another can be an opened/closed narrowed pathway arranged downstream of the regulator in parallel with the open narrowed pathway. In this case, the open/close section that switches the opened/closed narrowed pathway between as open position and a closed position. | 09-24-2009 |
| 20090202143 | SOLDER PRINTING INSPECTION APPARATUS AND COMPONENT MOUNTING SYSTEM - A component mounting system includes a solder printing inspection apparatus and a component mounting apparatus. The solder printing inspection apparatus includes an ideal solder position generation unit, an ideal loading position generation unit, an image processing unit, and an ideal solder inspection standard generation unit. The ideal solder position generation unit generates ideal solder position information, and the ideal loading position generation unit generates ideal loading position information. The image processing unit generates actual solder position information and loading estimate position information. The ideal solder inspection standard generation unit generates ideal solder inspection position information. A calculation apparatus inspects a solder included in a solder group based on actual inspection standard information obtained by shifting of the ideal solder inspection standard information by just the actual position adjustment information, and the calculation apparatus outputs mounting position adjustment information to the component mounting apparatus. | 08-13-2009 |
| 20090167214 | ELECTRICAL ACTUATOR - An electric actuator includes a motion conversion mechanism and a position detector. The motion conversion mechanism converts rotation of a rotary shaft of a motor into linear motion of an output shaft. The position detector detects a permanent magnet M, which moves integrally with the output shaft. A motor control portion controls the motor based on commands from a host command unit. A control program for controlling the motor includes, as control modes, six fluid pressure cylinder modes, according to which the motor is controlled. Specifically, each of the control modes corresponds to one of the cases where the fluid pressure cylinder is controlled by three solenoid valves, or a two-position single solenoid valve, a two-position double solenoid valve, and a three-position double solenoid valve. The motor is controlled according to the selected control mode. | 07-02-2009 |
| 20090165872 | Gas Supply Unit and Gas Supply System - A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed. | 07-02-2009 |
| 20090112491 | Flow rate verification failure diagnosis apparatus, flow rate verification failure diagnosis system, flow rate verification failure diagnosis method, and control program product for flow rate verification failure diagnosis - A flow rate verification failure diagnosis apparatus is applied to a gas supply pipe system including flow rate control devices and a flow rate verification unit for detecting flow rate abnormality by measuring flow rate of each of the flow rate control devices on the basis of pressure measured by a pressure measurement device. The flow rate verification failure diagnosis apparatus comprises a failure diagnosis device having a mode to diagnose a failure in the pressure measurement device at a time of the flow rate verification unit detecting the flow rate abnormality, thereby the reliability of flow rate verification can be enhanced. | 04-30-2009 |
| 20090097738 | APPARATUS FOR INSPECTING SOLDER PRINTING - An apparatus for inspecting solder printing includes a memory medium, an ideal solder information generation unit, and an image processing unit. Design data are stored in the memory medium. The ideal solder information generation unit generates “ideal solder position information” and “ideal solder sizes” from the ideal solder regions in the design data. The image processing means extracts the actual solder regions of solder on the printed board K from image data imaged by the CCD camera and generates “actual solder position information” from the actual solder regions. The image processing unit generates “position misalignment amounts” between the “ideal solder position information” and “actual solder position information,” generates “print misalignment rates” indicating the extents of the “position misalignment amounts” relative to the “ideal solder sizes,” calculates a correction value relating to print position based on the “print misalignment rates,” and outputs a correction value signal to the solder printing machine. | 04-16-2009 |
| 20090095364 | Fluid flow distribution and supply unit and flow distribution control program - A fluid flow distribution and supply unit for distributing and supplying a fluid is adapted to immediately control a flow rate of a fluid to be distributed and promptly output the fluid at a predetermined flow distribution ratio. The fluid flow distribution and supply unit comprises a flow rate control device for controlling a flow rate of the fluid and a plurality of on/off valves connected to a secondary side of the flow rate control device. The on/off valves are duty controlled to open and close by determining one cycle corresponding to an operation period of the on/off valves and time-dividing the one cycle at the flow distribution ratio. | 04-16-2009 |
| 20090091125 | Fluid device connecting structure and fluid device unit - For simply and reliably coupling first and second fluid devices, a fluid device connecting structure is arranged to couple first and second connection parts of the first and second fluid devices by use a coupling member by placing a resin seal member in seal grooves formed in the connection parts. The first connection part includes a first mounting groove for attachment jig and a first fitting groove provided between the first mounting groove and an end face of the first connection part to receive the coupling member. The second connection part includes a second mounting groove for the jig and a second fitting groove provided between the second mounting groove and an end face of the second connection part to receive the coupling member. The coupling member includes a plurality of split members each including a first projecting portion held in contact with an end-face-side inside surface of the first fitting groove and a second projecting portion held in contact with an end-face-side inside surface of the second fitting groove, the first and second projecting portions being arranged at a predetermined distance. | 04-09-2009 |
| 20090063059 | Flow verification system and flow verification method - A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system further comprising a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas by integrating the pressure values measured by the pressure sensor to calculate a pressure integrated value and comparing the pressure integrated value with the benchmark when the process gas is supplied to the flow control device through the first cutoff valve, controlled in a flow rate by the flow control device, and supplied to the pressure sensor. | 03-05-2009 |
| 20090059717 | Fluid mixing system and fluid mixing apparatus - A fluid mixing system capable of quickly stabilizing flow rates of a plurality of fluids to be mixed is arranged to mix the fluids and deliver a mixture thereof to a container. The system includes a plurality of on-off valves for the respective fluids and delivering the fluids to the container. The on-off valves are caused to open and close in order according to respective duty ratios each indicating an opening/closing ratio in a cycle. | 03-05-2009 |
| 20090057600 | Vacuum opening/closing valve - A durable vacuum opening/closing valve connectable with a vacuum chamber and a vacuum pump is arranged to control vacuum pressure in the vacuum chamber by changing an opening degree of an O ring serving as a valve element relative to a valve seat. A predetermined clearance between an outer peripheral surface of a piston and an inner peripheral surface of a cylinder is sealed by a bellofram which changes its shape in association with movement of the piston moved to open or close the valve. The bellofram includes an inclined surface with a predetermined inclination angle and the outer periphery of the piston includes an inclined surface with a predetermined inclination angle, so that an inner diameter of the bellofram in contact with the piston and the outer diameter of the piston are equal when the valve element is in contact with the valve seat. | 03-05-2009 |
| 20090039304 | Flow Control Valve - A flow control valve is provided in a manner to be capable of locking a position of a differential screw easily without displacing a position adjusted valve element body. The valve element body is brought into or out of contact with a valve seat provided between a first port and a second port, and is connected to an operation member. The operation member is movably inserted into a cover and urged to a direction toward the valve seat by an urging member. A position of the operation member is adjusted by a differential screw, and accordingly a position of the valve seat is adjusted. A rotation member for exerting a rotation force on the differential screw is slidably mounted in the cover along a moving direction of the operation member without rotating. A locking portion is provided in the rotation member to engage with the cover without rotating when the operation member is slid along its moving direction. | 02-12-2009 |
| 20090020723 | Manual valve - A manual valve comprises a valve element, a rod connected to the valve element, and a knob for moving the rod by screw feeding in an opening/closing direction with respect to the valve element. The valve element is moved by rotation of the knob through the rod. The rod includes an external thread portion on an outer periphery thereof and is not connected to the knob and is held against rotation. Further, the manual valve includes a cylindrical sliding nut rotatably held by a body and formed with an internal thread portion to be engaged with the external thread portion of the rod on its inner periphery and a clip fixed to the knob to be elastically deformably engaged with the sliding nut but disengaged when a larger torque than the predetermined value is applied. | 01-22-2009 |
| 20090020722 | Fluid Control Valve - For providing a fluid control valve capable of preventing looseness of a screw part between a valve main body and a valve upper body, the fluid control valve comprises a resin valve main body wherein a valve seat comes into or out of contact with a diaphragm, and a resin valve upper body engaged with the valve main body. The fluid control valve comprises a holding member to keep the valve main body and the valve upper body threadedly screwed together. | 01-22-2009 |
| 20090019943 | Gas Flow Rate Verification Unit - A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector. The volume (Vk) between the valve seat of the first cutoff valve and the valve seat of the second cutoff valve is equal to or less than the volume (Ve) between the outlet of the flow control device and the valve seat of the first cutoff valve. | 01-22-2009 |
| 20080314564 | TEMPERATURE CONTROL DEVICE - A temperature control device controls the temperature of a controlled object by circulating a fluid in a temperature adjustment unit arranged near the controlled object. The temperature control device comprises a heating pathway that heats and circulates the fluid in the temperature adjustment unit, a cooling pathway that cools and circulates the fluid in the temperature adjustment unit, a bypass pathway that does not pass the fluid through the heating pathway and cooling pathway, but circulates the fluid in the temperature adjustment unit, and adjustment means that adjust a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit via a confluence unit that combines these flows. The adjustment means are provided on a downstream side of each of the heating pathway, the cooling pathway, and the bypass pathway and on the upstream side of the confluence unit. | 12-25-2008 |
| 20080302427 | Vacuum pressure control system - A vacuum pressure control system includes a vacuum chamber, a vacuum pump for sucking gas from the vacuum chamber, a vacuum open/close valve for controlling vacuum pressure in the vacuum chamber by changing a opening degree by driving air supplied from an air supply source serving as a power source, a vacuum pressure control device for controlling the vacuum open/close valve, and a servo valve for controlling the opening degree of the vacuum open/close valve. | 12-11-2008 |
| 20080290312 | Fluid control valve - A fluid control valve comprises a diaphragm formed of a plurality of circular thin metal plates laminated one on another, the diaphragm being placed to be movable into or out of contact with a valve seat for closing and opening the valve. Each thin metal plate has a warp in a predetermined direction due to rolling anisotropy, and the thin metal plates are laminated with the directions of respective warps coinciding with one another in such a manner that variations in lift amount of the diaphragm are decreased. | 11-27-2008 |
| 20080223455 | Gas supply unit - To provide a gas supply unit capable of stabilizing a gas supply amount, the gas supply unit includes a mass flow controller, a first fluid control valve connected to the mass flow controller, a second fluid control valve connected in parallel to the first fluid control valve, and a third fluid control valve placed on a secondary side of the second fluid control valve. An opening degree of the third fluid control valve is adjusted based on a pressure difference between secondary pressure of the first fluid control valve and secondary pressure of the second fluid control valve. | 09-18-2008 |
| 20080202614 | Passage block and manufacturing method thereof - A passage block formed with a passage connectable to a fluid control device comprises a first block member formed with a plurality of first-coupling-face apertures, a second block member formed with a plurality of second-coupling-face apertures in correspondence with the first-bonding-apertures, a first passage-end contact portion formed around each of the first-coupling-face apertures, a second passage-end contact portion formed around each of the second-coupling-face apertures, and a passage-end contact section provided in such a manner that a lower surface of the first block member and an upper surface of the second block member are arranged to face each other so that the first and second passage-end contact portions contact with each other, and the first and second block members are heated under pressure to diffusion-bond the first and second passage-end contact portions to each other. | 08-28-2008 |
