CITIZEN SEIMITSU CO., LTD.
|CITIZEN SEIMITSU CO., LTD. Patent applications|
|Patent application number||Title||Published|
|20080233841||DISK-SHAPED SUBSTRATE MANUFACTURING METHOD - The disk-shaped substrate manufacturing method is provided with: generating an air stream downward from an upper area during grinding a disk-shaped substrate in a grinding apparatus; arranging the grinding apparatus on an upper floor face of a floor and arranging water on a lower floor face of the floor, the upper floor face being made of a board having penetration holes or a mesh member, and the lower floor face supporting the upper floor face so as to be located above the lower floor face with a distance; and guiding dust made by the grinding apparatus to the water by use of the air stream.||09-25-2008|
|20080223402||DISK-SHAPED SUBSTRATE MANUFACTURING METHOD AND WASHING APPARATUS - The disk-shaped substrate manufacturing method is provided with: scrub-washing a first surface and a second surface of a disk-shaped substrate by respectively using a first porous roller and a second porous roller that have a cylindrical shape and are rotationally driven. The process of the scrub-washing determines a distance between axes of the first porous roller and the second porous roller that sandwich the disk-shaped substrate in between, and performs scrub-washing while the determined distance between the axes is under control.||09-18-2008|
|20080200097||POLISHING METHOD AND POLISHING APPARATUS - The polishing method of a disk-shaped substrate for polishing an outer circumference||08-21-2008|
Patent applications by CITIZEN SEIMITSU CO., LTD.