China Institute of Technology Patent applications |
Patent application number | Title | Published |
20100084261 | METHOD FOR FABRICATING POLYMERIC WAVELENGTH FILTER - The present invention discloses a method for fabricating polymeric wavelength filter, which method for forming gratings patterns on the UV polymer involves three processing steps. First, a gratings pattern is holographically exposed using a two-beam interference pattern on a positive photo-resister film. A 20-nm-thick nickel thin film is then sputtered onto the positive photo-resister film to form a nickel mold. This nickel mold on the photo-resister film then can be subsequently used to transfer the final gratings pattern onto a UV cure epoxy polymer. Whereby, a polymer film can be spun coated on the cure epoxy substrate so as to simplify the fabrication process for obtaining a polymer wavelength filter with good aspect ratio of gratings pattern. | 04-08-2010 |
20090136180 | POLYMER WAVELENGTH FILTERS WITH HIGH-RESOLUTION PERIODICAL STRUCTURES AND ITS FABRICATION USING REPLICATION PROCESS - The present invention discloses a method for fabricating polymer wavelength filter with high-resolution periodical structure, which comprises following steps: (a) a positive photo-resister film is coated on a substrate; (b) a grating pattern is holographically exposed on the positive photo-resister film; (c) the photo-resister film is coated with a negative photo-resister film; (d) the sample is exposed by UV light; (e) develops the sample to obtain a negative waveguide on the photo-resister film having gratings pattern on its bottom to be a waveguide mold; (f) coats a diluted PDMS film on the patterned waveguide mold; (g) bakes the PDMS film to be cured, and peels off from the waveguide mold to be a PDMS mold; (h) places a spacer between the PDMS mold and a thin glass slide to form a first tunnel; (i) injects a precure first UV polymer into the first tunnel; (j) cures the first UV polymer under a broadband UV light; (k) separates the first UV polymer when fully cured, a hardened first UV polymer is formed having a groove with gratings pattern at its bottom for forming a cladding layer of the polymer wavelength filter; (l) a thin layer of a polydimethylsiloxane is spun onto a glass slide, and the glass slide is placed over the groove of the first UV polymer; (m) a second UV polymer is injected into the groove of the first UV polymer; and (n) the second UV polymer is cured by exposing the UV light, and to form the core of the waveguide in the groove of the first UV polymer to finally be the polymer wavelength filter. | 05-28-2009 |