| CENTROTHERM THERMAL SOLUTIONS GMBH & CO. KG Patent applications |
| Patent application number | Title | Published |
|---|
| 20110037259 | CONNECTOR FOR GAS OR LIQUID LINES AND USE THEREOF - A connector for gas or liquid lines has a core piece with a core and a sleeve piece with a sleeve. A pressure space surrounds the core and the sleeve when the two are connected to one another. The pressure space is set at an overpressure with respect to a line space of the connector. The connector is useful, for example, in connecting a diffusion tube of a low-pressure diffusion furnace to a gas outlet lance. | 02-17-2011 |
| 20100215853 | METHOD FOR CONTROLLING PROCESS GAS CONCENTRATION - A method for controlling process gas concentration for treatment of substrates in a process space in which a medium is evaporated in a bubbler by bubbles of a carrier gas passed through the medium is achieved by producing a stipulated constant internal pressure in the bubbler and subsequent introduction of the carrier gas into the bubbler with simultaneous temperature control of the medium being evaporated within the bubbler to set a stipulated vapor pressure. | 08-26-2010 |
