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CENTRE NATIONAL DE LA RECHERCHESECIENTIFQUE-CNRS
| CENTRE NATIONAL DE LA RECHERCHESECIENTIFQUE-CNRS Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20090095923 | INSTALLATION AND METHOD OF NANOFABRICATION - Nanofabrication installation comprising: a specimen holder, for holding a specimen; a mask, having a through-opening between the upper and lower faces of the mask, for letting charged particles through onto the specimen holder; a near-field detection device for detecting a relative position between the mask ( | 04-16-2009 |