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Central Glass Company,Ltd.
| Central Glass Company,Ltd. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20110070544 | Novel Salt Having Fluorine-Containing Carbanion Structure, Derivative Thereof, Photoacid Generator, Resist Material Using the Photoacid Generator, and Pattern Forming Method - There is provided an acid having a fluorine-containing carbanion structure or a salt having a fluorine-containing carbanion structure, which is represented by the following general formula (1). | 03-24-2011 |