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CARL VON OSSIETZKY UNIVERSITÄT OLDENBURG

CARL VON OSSIETZKY UNIVERSITÄT OLDENBURG Patent applications
Patent application numberTitlePublished
20110175207METHOD FOR PRODUCING METAL OXIDE LAYERS - The invention relates to a method for producing metal oxide layers from oxides of rare earth metals on silicon-containing surfaces, to the device used to carry out the coating method, and to the use of the starting materials used in the method according to the invention for the coating method.07-21-2011