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Canon Avelva Corporation
Kawasaki-shi, JP
| Canon Avelva Corporation Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20100062602 | Etching method, method for producing dielectric film of low dielectric constant, method for producing porous member, etching system and thin film forming equipment - To provide an etching method employing a novel CVD system and an etching apparatus applicable to the method. | 03-11-2010 |