| CANON ANELVA TECHNIX CORPORATION Patent applications |
| Patent application number | Title | Published |
|---|
| 20100186427 | Exhaust system - An exhaust system includes an entrapment vacuum pump equipped with a refrigerator, a master compressor which is driven in a driving frequency band to make constant a pressure difference between gas recovered from the refrigerator via a low-pressure gas recovery pipe and compressed gas supplied to the refrigerator via a high-pressure gas supply pipe, and a first sub-compressor which is driven at a predetermined driving frequency to supply compressed gas at a first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe. In addition, a second sub-compressor is driven at a predetermined driving frequency to supply compressed gas at a second gas volume larger than the first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe, and a controller monitors a driving frequency of the master compressor and controls driving or a stop of the first sub-compressor and driving or a stop of the second sub-compressor, based on the driving frequency. | 07-29-2010 |
| 20100164502 | COLD CATHODE IONIZATION VACUUM GAUGE WITH TRIGGER PLATE - To provide a cold cathode ionization vacuum gauge that does not have a complicated structure and can induce discharge in a short time even after the cold cathode ionization vacuum gauge is used for a long time. A cold cathode ionization vacuum gauge has a rod-like anode | 07-01-2010 |
| 20100163723 | MASS SPECTROMETER SYSTEM AND MASS SPECTROMETRY METHOD - A mass spectrometer system comprises a chamber having an ion emitting unit to emit metal ions in the chamber with a communicating hole; a neutral molecule introduction unit; another gas introduction unit; a controller controlling a temperature of a region where metal ions attach to the neutral molecules; and a mass analyzer for the neutral molecules with the metal ions, wherein plotting an attachment energy of the metal ions attached to the neutral molecules in the chamber along an abscissa and the temperature of the region where the metal ions attach to the neutral molecules along an ordinate, the controller adjusts the temperature of the region so as to fall within a range obtained by excluding a range corresponding to the temperature of the region from 150 to 200° C. from a range surrounded by the temperatures of the region [° C.]=150×attachment energy [eV], 100×attachment energy [eV]−50, and 20° C., and attachment energies [eV]=2.1 and 0.5. | 07-01-2010 |
| 20100163722 | MASS SPECTROMETRY AND MASS SPECTROMETER USED FOR THE SAME - The present invention maintains a stable emission amount from an emitter. In an embodiment of the present invention, a solid sample or a liquid sample is heated to gasify an object to be measured contained in the solid sample or the liquid sample, thereby forming a neutral gaseous molecule, and a metal ion emitted from an emitter having an oxidized surface is attached to the neutral gaseous molecule to ionize the neutral gaseous molecule, which is subjected to mass spectrometry. The solid sample or the liquid sample is a sample that emits a reducing gas by heating. The heating for gasifying the object to be measured is performed at a temperature lower than the vaporization temperature of the solid sample or the liquid sample and not less than the vaporization temperature of the object to be measured, and an oxidizing gas is provided to the emitter. | 07-01-2010 |
| 20100154552 | CAPACITANCE DIAPHRAGM GAUGE AND VACCUM APPARATUS - A capacitance diaphragm gauge includes an inclination angle sensor which detects the inclination angle of the gauge. The pressure dependences of capacitance obtained when the capacitance diaphragm gauge is mounted on a vacuum apparatus at the first inclination angle (+90°), the second inclination angle (0°), and the third inclination angle (−90°) are stored in a storage unit in advance. A pressure measurement value is then corrected based on the inclination angle information detected by the inclination angle sensor and the capacitance-pressure characteristic data is actually measured at the first, second and third inclination angles, and stored in the gauge. | 06-24-2010 |
| 20100011783 | CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP - A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body | 01-21-2010 |
| 20090272894 | MASS SPECTROMETER AND MASS SPECTROMETRY METHOD - A mass spectrometer includes an ionization chamber, a temperature control unit which controls the temperature in the ionization chamber to vaporize a sample in at least one of solid and liquid state in the ionization chamber, an introduction unit which introduces the sample into the ionization chamber, an ion supply unit which supplies ions to the ionization chamber to ionize, in the ionization chamber, the sample vaporized in the ionization chamber, and a mass analyzer which measures the mass of the molecules of the ionized sample. | 11-05-2009 |
| 20090266981 | INTERNAL STANDARD MATERIAL, RESIN COMPOSITION, AND MEASUREMENT METHOD - An internal standard material to be added to a specimen containing a material to be measured when measuring the content of the material to be measured by performing mass spectrometry on the specimen includes a hindered phenol compound. | 10-29-2009 |
| 20090266979 | ION ATTACHMENT MASS SPECTROMETER AND ION ATTACHMENT MASS SPECTROMETRY METHOD THEREOF - An ion attachment mass spectrometer includes an attached ion generation unit which generates attached ions by attaching positively charged metal ions to the molecules of a measurement target substance, and a mass spectrometry unit which performs mass spectrometry of the attached ions. The mass spectrometry unit includes a mass separation chamber to select attached ions having a specific mass number from the attached ions, an ionization chamber to dissociate the attached ions having the specific mass number, and a mass analysis chamber to analyze the dissociated ions. | 10-29-2009 |
| 20090235752 | ELECTROSTATIC CAPACITANCE DIAPHRAGM VACUUM GAUGE AND VACUUM PROCESSING APPARATUS - In an electrostatic capacitance diaphragm vacuum gauge, a diaphragm and a detection electrode opposing the diaphragm are arranged in a vacuum. The electrostatic capacitance diaphragm vacuum gauge measures pressure by measuring the change degree of an electrostatic capacitance between the diaphragm and detection electrode. The electrostatic capacitance diaphragm vacuum gauge includes atmospheric pressure variation factor detection units which detect atmospheric pressure variation factors as external factors that varies the pressure of the vacuum. The pressure of the vacuum is measured by subtracting information detected by the atmospheric pressure variation factor detection units. | 09-24-2009 |
| 20090199649 | PIRANI VACUUM GAUGE - A Pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire and a support unit for supporting the heat filament in a container, wherein a gas pressure is measured based on an amount of heat conducted away from the heat filament by gas molecules colliding with the heat filament, characterized in that a body of the container is filled with metal material, but a first cylindrical bore and a second cylindrical bore extend through the body, the heat filament being inserted into the first cylindrical bore and the support unit being inserted into the second cylindrical bore. | 08-13-2009 |
| 20090169923 | SUBSTRATE PROCESSING USING THE VAPOR SUPPLYING APPARATUS - A vapor supplying apparatus comprises a holding unit for holding a liquid or solid substance; cooling means for cooling the holding unit; detection means for detecting the temperature of the holding unit; and a control means for controlling said cooling means based on the temperature detected by the detection means. The temperature of the holding unit is adjusted by using the cooling means under the control of the control means, thereby to control vaporization or sublimation of the liquid or solid substance in supplying a vapor of the substance. Means for measuring the pressure of the vapor vaporized or sublimated from the liquid or the solid substance is provided under the atmosphere in which the water supplying apparatus is placed, and the control means controls the temperature of the holding unit so that the pressure of the vapor becomes a predetermined value based on the measured pressure. | 07-02-2009 |
| 20090165470 | CRYOPUMP, CRYOPUMP UNIT, VACUUM PROCESSING APPARATUS INCLUDING CRYOPUMP UNIT, AND CRYOPUMP REGENERATION METHOD - A cryopump regeneration method includes a temperature raising step of raising the temperature of a cryopanel so as to vaporize gas molecules condensed on the exhaust surface of the cryopanel, an evacuation step of evacuating a pump vessel, a determination step of determining whether the internal pressure of the pump vessel has reached a set pressure higher than the water vapor pressure at 0° C., a pressure rise test step of stopping the evacuation and performing a pressure rise test, and an observation step of observing residual water based on the internal pressure of the pump vessel. | 07-02-2009 |
| 20090165465 | COOLING APPARATUS AND VACUUM COOLING APPARATUS - A cooling apparatus includes a refrigerating machine including a cooling portion fixed to a support body and cools a cooling target through the cooling portion. The cooling target and the cooling portion are connected by a structure including an extendable pipe filled with a fluidized refrigerant. A first magnetic body fixed to a side of the support body and a second magnetic body fixed to a side of the pipe are arranged around the pipe. The first magnetic body and the second magnetic body are maintained in non-contact with each other. | 07-02-2009 |
| 20090126374 | CRYOPUMP APPARATUS AND OPERATION METHOD THEREFOR - A cryopump apparatus includes a sensor which detects at least one of the temperature and pressure in a cryopump, a controller which detects a change in at least one of the temperature and pressure in the cryopump on the basis of the detection result obtained by the sensor, thereby determining the connection state between the controller and the cryopump, and a display device which displays an abnormal point for the cryopump estimated from the determination result obtained by the controller. | 05-21-2009 |
| 20090114029 | ELECTROSTATIC CAPACITANCE DIAPHRAGM TYPE PRESSURE SENSOR - An electrostatic capacitance diaphragm type pressure sensor which includes a stationary electrode and a diagraph that are arranged to oppose each other, and in which the diaphragm is deformed by an external force and a pressure is obtained from an electrostatic capacitance between the stationary electrode and diaphragm which changes in accordance with deformation of the diaphragm, includes an outer case which surrounds the main body of the sensor, a heater arranged on the inner surface of the outer case, a temperature sensor to measure the temperature inside the outer case, and a temperature adjustment circuit which compares a temperature signal obtained by the temperature sensor with a predetermined value and outputs a drive signal to drive the heater on the basis of the comparison result. | 05-07-2009 |
| 20090107154 | COOLING TRAP UNIT - A cooling trap unit including a vacuum vessel with a drain port, a refrigerator connected to the vacuum vessel such that an endothermic unit is located on a vacuum side, and a cooling panel which is fixed to the endothermic unit to be in tight contact with it and condenses or solidifies gas, includes a water reservoir unit capable of storing liquefied liquid in the vacuum vessel, when liquefying the gas condensed or solidified by the cooling panel and discharging the liquid outside the vacuum vessel, such that the liquefied liquid is in contact with the cooling panel, and a detection unit for discharging the liquid stored in the water reserving unit through the drain port based on a detection signal which is obtained by detecting a change in temperature of the liquid and indicates that the temperature reaches a predetermined value | 04-30-2009 |
