20140134324 | AUTOMATIC LITHIUM TARGET REGENERATING APPARATUS AND AUTOMATIC LITHIUM TARGET REGENERATING METHOD - Provided are an automatic lithium target regenerating apparatus and an automatic lithium target regenerating method, which are equipped with a measurement function of a lithium film thickness of a lithium target, and may automatically regenerate the consumed lithium target by moving a vapor deposition source to the lithium target. An automatic lithium target regenerating apparatus ( | 05-15-2014 |