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BOC EDWARDS JAPAN LIMITED
| BOC EDWARDS JAPAN LIMITED Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20090116959 | Turbo-Molecular Pump and Method of Assembling Turbo-Molecular Pump - To improve the assembling efficiency of a urbo-molecular pump having a structure in which the outside diameter of a rotor blade on the exhaust port side is smaller than the outside diameter of a rotor blade on the intake port side. | 05-07-2009 |