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BOARD OF REGENTS OF THE UNIVERSITY & COMMUNITY COLLEGE SYSTEM OF NEVADA ON BEHALF OF UNV

BOARD OF REGENTS OF THE UNIVERSITY & COMMUNITY COLLEGE SYSTEM OF NEVADA ON BEHALF OF UNV Patent applications
Patent application numberTitlePublished
20080258085Electro-Less Discharge Extreme Ultraviolet Light Source - An electrode-less discharge source of extreme ultraviolet (EUV) radiation (10-23-2008