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BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN
| BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20090255555 | Advanced cleaning process using integrated momentum transfer and controlled cavitation - A method and apparatus for cleaning a workpiece are disclosed. A gas and cleaning solution are supplied to an atomizing nozzle which atomizes the cleaning solution and sprays the top surface of a workpiece with an atomized spray. A liquid having a controlled gas content is flowed to the top surface of the workpiece from a rinse nozzle. Megasonic energy is applied from the backside of the workpiece. | 10-15-2009 |