| BENEQ OY Patent applications |
| Patent application number | Title | Published |
| 20120120514 | STRUCTURE COMPRISING AT LEAST ONE REFLECTING THIN-FILM ON A SURFACE OF A MACROSCOPIC OBJECT, METHOD FOR FABRICATING A STRUCTURE, AND USES FOR THE SAME - A structure comprising at least one reflecting thin-film on a surface of a macroscopic object is disclosed. The surface of the macroscopic object, without the at least one thin-film, reflects less than 50% of incident light in the visible wavelength band and is opaque, and reflection of visible light from the surface of the macroscopic object, with the at least one thin-film on the surface of the macroscopic object, is essentially spectrally uniform and flat over available viewing angles. The at least one thin-film is dielectric and essentially transparent to visible light, and the at least one thin-film is fabricated by exposing the surface of the macroscopic object to alternately repeating, essentially self-limiting, surface reactions of two or more precursors, for increasing the reflectance of specularly reflected visible light in the visible wavelength band from the surface. | 05-17-2012 |
| 20120070579 | METHOD AND APPARATUS FOR COATING GLASS SUBSTRATE - A coating process for coating a surface of a glass substrate in normal air pressure, in which coating process at least one liquid starting material is atomized into droplets and the formed droplets are guided towards the surface to be coated. The formed droplets are vaporized substantially close to the surface to be coated before the droplets contact the surface to be coated by bringing to the coating process the thermal energy needed for vaporizing the droplets with the glass substrate. | 03-22-2012 |
| 20120067284 | APPARATUS - An apparatus for carrying out atomic layer deposition onto a surface of a substrate by exposing the surface of the substrate to alternate starting material surface reactions, the apparatus including two or more low-pressure chambers, two or more separate reaction chambers arranged to be placed inside the low-pressure chambers, and at least one starting material feed system common to two or more low-pressure chambers for carrying out atomic layer deposition. The apparatus includes at least one loading device arranged to load and unload substrates to/from the reaction chamber and further to load and unload the reaction chambers to/from the low-pressure chambers. | 03-22-2012 |
| 20120060536 | METHOD AND APPARATUS FOR TEMPERING MATERIAL - A method and apparatus for tempering material is provided. One or more liquids are atomized by at least one sprayer into droplets which are guided towards a surface of a hot material so that at least some of the droplets collide with the surface of the hot material and evaporate, thus removing thermal energy from the surface layer of the hot material. Impact members may be used to further reduce the size of the droplets. The droplets may be guided to the surface by a separate guiding gas flow. | 03-15-2012 |
| 20120055407 | ARRANGEMENT FOR PROCESSING SUBSTRATE AND SUBSTRATE CARRIER - The invention relates to an arrangement for processing a substrate in a reaction chamber of a gas deposition apparatus by exposing the substrate to alternate, saturated surface reactions of starting materials, the arrangement comprising loading means for loading the substrate into the reaction chamber on a substrate support. In accordance with the invention, the substrate is arranged for being attached in a detachable manner with an adhesive to the substrate carrier. | 03-08-2012 |
| 20120040193 | ANTIBACTERIAL GLASS - A coated article is disclosed. The coated article comprises an antibacterial coating on a glass substrate, the substrate having a modified surface layer which essentially reduces the ion exchange between silver in the antibacterial coating and sodium in the glass substrate. Apparatus and method for forming such article are also disclosed. | 02-16-2012 |
| 20120015106 | METHOD AND APPARATUS FOR COATING - The invention relates to a method and an apparatus for coating one or more objects ( | 01-19-2012 |
| 20110274837 | ALD REACTOR, METHOD FOR LOADING ALD REACTOR, AND PRODUCTION LINE - An ALD reactor for treating one or more substrates is provided. The ALD reactor includes at least one reaction chamber which has a front plate including gas connections for introducing starting materials, flushing gases and the like gases into the reaction chamber. In addition, the front plate is arranged for being placed over the substrate for closing the reaction chamber and at distance from the substrate surface for opening the reaction chamber such that the substrate is arranged for being loaded below, above or in front of the front plate, when the reaction chamber is in the open state, in which the front plate is at a distance from the substrate and such that the substrate is treatable by the ALD method in the closed state of the reaction chamber, in which the front plate is placed onto the substrate. | 11-10-2011 |
| 20110265720 | GAS DEPOSITION REACTOR - A reactor is provided for a gas deposition method, in which method the surface of a substrate is subjected to alternate starting material surface reactions. The reactor includes a first chamber, a second chamber mounted inside the first chamber, and heating means for heating the first chamber. The reactor also includes one or more heat transfer elements for equalising temperature differences inside the first chamber. | 11-03-2011 |
| 20110265719 | REACTION CHAMBER - A reaction chamber for an atomic layer deposition reactor is provided. The reaction chamber includes outer walls for providing a reaction space inside the reaction chamber. At least one of the outer walls of the reaction chamber is made from a flexible thinsheet. | 11-03-2011 |
| 20110229644 | GLASS COATING PROCESS AND APPARATUS - A process and an apparatus for coating glass substrate by using at least one or more liquid raw materials which react essentially on or in the vicinity of at least a portion of the glass substrate surface. The process comprises steps: a) heating the glass substrate to at least substantially the coating temperature; b) forming a coating on the glass substrate surface by converting the one or more liquid materials to a liquid-aerosol and depositing at least a fraction of the liquid-aerosol on the glass substrate surface; c) repeating step b) at least once; and d) heating the glass substrate surface before at least one of the steps b). The heating in step d) is carried out by convective heating. | 09-22-2011 |
| 20110223344 | PROCESS AND APPARATUS FOR COATING GLASS - A process and an apparatus for coating glass by means of a method using at least one or more liquid raw materials which react essentially on at least a portion of the glass substrate forming a coating on it. At least part of the liquid raw materials is atomized to droplets with one or more two-fluid atomizer and at least a fraction of the gas used in the one or more two-fluid atomizers is electrically charged such that at least a fraction of the droplets become electrically charged during or after the atomization. According to the invention the droplets are formed into a separately created electric field. | 09-15-2011 |
| 20110111175 | METHOD FOR INCREASING THE DURABILITY OF GLASS AND A GLASS PRODUCT - A method for increasing the durability of glass ( | 05-12-2011 |
| 20110041556 | GLASS SURFACE MODIFICATION PROCESS - Process for improving the chemical durability of glass by modifying at least one surface of a glass substrate. The modification process utilizes crystalline metal oxide particles with a mean aerodynamic particle diameter of less than 1000 nm, which are at least partially embedded on and into the glass surface. Apparatus for depositing crystalline metal oxide particles on glass surface. | 02-24-2011 |
| 20110027475 | METHOD AND DEVICE FOR STRUCTURING A SURFACE - The invention relates to a method and a device for structuring a surface of a material by directing at a surface to be structured ( | 02-03-2011 |
| 20110014385 | METHOD AND APPARATUS FOR COATING AN ARTICLE USING A SPRAY-COATING METHOD - The invention relates to a method and apparatus for coating an article using a spray-coating method. Coating can be produced by atomizing a fluid coating precursor material into droplets with an average diameter of 0.5 to 5 micrometres. The droplets are introduced onto the article to be coated at a velocity that exceeds the critical impaction velocity. The evaporation of the droplets can be controlled by controlling the concentration of the fluid precursor material solvent in the spray chamber. | 01-20-2011 |
| 20110003087 | METHOD AND APPARATUS FOR GENERATING PLASMA - A reaction chamber of a reactor for coating or treating a substrate by an atomic layer deposition process (ALD) by exposing the substrate to alternately repeated surface reactions of two or more gas-phase reactants. The reaction chamber is configured to generate capacitively coupled plasma and comprises a reaction space within said reaction chamber, a first inlet to guide gases into the reaction chamber and an outlet to lead gases out of the reaction chamber. The reaction chamber is configured to lead the two or more reactants into the reaction chamber such that the two or more reactants may flow through the reaction space across the substrate in a direction essentially parallel to the inner surface of the lower wall. | 01-06-2011 |
| 20100330377 | DEVICE FOR FORMING AEROSOL, AND METHOD AND APPARATUS FOR COATING GLASS - The invention relates to a device for forming aerosol, the device comprising at least one gas-dispersing atomizer for atomizing a liquid into aerosol by means of gas at an atomizing head of the atomizer and an atomizing chamber, which is in flow connection with the atomizing head and in which flow restraints are arranged for changing the hydrodynamic properties of the aerosol flow discharging from the atomizing head. According to the present invention the flow restraints are arranged in the inner walls of the atomizing chamber in such a manner that they protrude from the inner walls to the inside of the atomizing chamber. | 12-30-2010 |
| 20100285205 | COATING METHOD - The invention relates to a process for coating and/or doping a surface of a substrate, an inner surface of a structure or another piece to be processed in a reaction space with the atomic layer deposition method (ALD method). In the process the substrate surface to be processed is subjected alternately to iterated, saturated surface reactions by feeding successive pulses of starting materials into the reaction space. In accordance with the invention, a pulse of starting materials, whose amount is predetermined, is fed into the reaction space; the amount/concentration of the starting materials and/or reaction products thereof is measured in the reaction space during and/or after the pulse or on a continuous basis; the amount of starting materials to be fed into the reaction space in a subsequent cycle is determined on the basis of the measurement results obtained in step b); and a next pulse of starting materials, whose amount corresponds to the measurement results obtained in step c), is fed into the reaction space. | 11-11-2010 |
| 20100266761 | METHOD FOR MANUFACTURING AN EXTREMELY HYDROPHOBIC SURFACE - The invention relates to a method and an apparatus for producing a hydrophobic surface on to a material. The invention involves directing at a surface to be structured a particle spray structuring the surface so as to structure the surface, and coating the structured surface with a hydrophobic material. According to the invention, particles larger than a determined size d | 10-21-2010 |
| 20100264233 | DEVICE AND METHOD FOR PRODUCING PARTICLES - A method and a device for producing particles in which a liquid is atomized into droplet sprays via at least two atomizers. At least two atomizers are arranged directed towards one another such that the droplet sprays produced thereby collide with one another so as to form mist, and that the device also includes a thermal reactor, where the mist forms particles having an average aerodynamic diameter of less than 1000 nm. | 10-21-2010 |
| 20100263409 | PROCESS FOR GLASS SURFACE MODIFICATION - Process for a fast ion-exchange between an alkaline metal ion in glass and another ion in gas atmosphere, in which process the glass surface is heated with a flame and the ion exchange takes part at the portion heated by the flame essentially simultaneously with heating. The process is fast enough to be integrated to a glass manufacturing or processing line. | 10-21-2010 |
| 20100258652 | DEVICE FOR FORMING AEROSOL, AND METHOD AND APPARATUS FOR COATING GLASS - The invention relates to a device for forming aerosol, the device comprising at least one gas-dispersing atomizer for atomizing a liquid into aerosol by means of gas at an atomizing head of the atomizer and an atomizing chamber, which is in flow connection with the atomizing head and in which flow restraints are arranged for changing the hydrodynamic properties of the aerosol flow discharging from the atomizing head. According to the present invention the flow restraints are arranged in the inner walls of the atomizing chamber in such a manner that they protrude from the inner walls to the inside of the atomizing chamber. | 10-14-2010 |
| 20100258650 | DEVICE AND METHOD FOR PRODUCING AEROSOL - The invention relates to a device for producing mist or aerosol. The device comprises at least two atomisers for atomizing a liquid into drop jets. In accordance with the invention, at least two atomizers are arranged oriented substantially directly towards one another in a manner making the drop jets produced thereby collide directly into each other. | 10-14-2010 |
| 20100167555 | METHOD IN DEPOSITING METAL OXIDE MATERIALS - The present invention relates to a method for enhancing uniformity of metal oxide coatings formed by Atomic Layer Deposition (ALD) or ALD-type processes. Layers are formed using alternating pulses of metal halide and oxygen-containing precursors, preferably water, and purging when necessary. An introduction of modificator pulses following the pulses of the oxygen-containing precursor affects positively on layer uniformity, which commonly exhibits gradients, particularly in applications with closely arranged substrates. In particular, improvement in layer thickness uniformity is obtained. According to the invention, alcohols having one to three carbon atoms can be used as the modificator. | 07-01-2010 |
| 20100107693 | METHOD FOR DOPING GLASS - The invention relates to a method for doping and/or colouring glass. In the method a two- or three-dimensional layer is formed on the surface of the glass, and the layer is further allowed to diffuse and/or dissolve into the glass to change the transmission, absorption, reflection and/or scattering of the electromagnetic radiation of the glass. The layer of nanomaterial includes at least one component that causes the above-mentioned change and at least one component that lowers the melting point of the above-mentioned component causing the change. | 05-06-2010 |
| 20100072429 | DEVICE AND METHOD FOR PRODUCING NANOTUBES - The invention relates to an apparatus for producing nanotubes, the apparatus being adapted to produce doped and/or undoped single-walled or multi-walled nanotubes, the apparatus comprising at least a thermal reactor. In accordance with the invention, the reactor is at least of the hottest part thereof and at least partly manufactured from a material that is at least partly sublimed into the thermal reactor as a result of the thermal reactor being heated, and the sublimed material at least partly participates in the growth of the nanotubes. | 03-25-2010 |
| 20100047554 | METHOD AND APPARATUS FOR MODIFYING SURFACE LAYER OF GLASS AND GLASS PRODUCT HAVING MODIFIED SURFACE LAYER - The invention relates to a method of modifying a surface of a glass product. The method comprises conveying particles to the surface of the glass, a material contained in the particles being at least partly dissolved and diffused in the glass. The method comprises a step of heating the surface of the glass. The invention further relates to an apparatus for modifying a surface of a hot glass product. The invention still further relates to glass products wherein the content of an element which provides the glass with a functionality decreases steplessly upon proceeding from the surface of the glass deeper into the glass. | 02-25-2010 |
| 20100016141 | APPARATUS AND METHOD FOR DYEING GLASS - The present invention relates to an apparatus and a method for dyeing glass and, more particularly, an apparatus and a method, by which both surfaces of hot sheet-like glass may be dyed simultaneously and/or the surface containing tin residues of the sheet glass may be dyed to have a different colour than the surface without tin residues. The apparatus of the invention may be used for dyeing both sheet glass and utility glass, such as glass beakers. | 01-21-2010 |
| 20090317504 | DEVICE AND METHOD FOR PRODUCING NANOPARTICLES - The invention relates to a device and a method for producing nanoparticles, in which method starting materials for nanoparticles are mixed at least as liquid droplets and optionally also as gases and/or vapours with at least combustion gases in a premixing chamber and the mixture is separated for liquid drops larger than size d, whereafter the mixture is conducted to at least one burner, in which the combustion gases are ignited such that a heavily mixing flame is generated, in which the starting materials react and optional solvents evaporate and generate through nucleation and/or sintering and/or agglomeration particles having a diameter of 1 to 1000 micrometres. | 12-24-2009 |
| 20090277390 | Source, an Arrangement for Installing a Source, and a Method for Installing and Removing a Source - The invention relates to an arrangement for installing a source into a gas deposition reactor. The arrangement comprises at least one source fitting for the source such that the source fitting is connected to a reaction space of the gas deposition reactor, and a source installable at least partly inside the source fitting or a source space connected to the source fitting. According to the invention, the arrangement further comprises reception means in the source fitting for receiving the source, and charging means for installing the source in place in the source fitting for use, and a chamber ( | 11-12-2009 |
| 20090255470 | ALD REACTOR - The invention relates to a reaction chamber of an ALD reactor which comprises a bottom wall, a top wall and side walls extending between the bottom wall and the top wall which define an inner portion ( | 10-15-2009 |
| 20090169743 | Arrangement in Connection with ALD Reactor - The invention relates to a loading apparatus for an ALD reactor, the ALD reactor comprising a vacuum chamber ( | 07-02-2009 |
| 20090155492 | METHOD AND APPARATUS FOR COATING GLASS - A method and apparatus for coating glass with a CVD method, the coating being deposited by delivering some of the coating material into coating in the form of solid particles, whose composition is substantially the same as the composition of the coating to be deposited and whose diameter is less than 200 nm. | 06-18-2009 |
| 20090104369 | METHOD FOR PRODUCING FUNCTIONAL GLASS SURFACES BY CHANGING THE COMPOSITION OF THE ORIGINAL SURFACE - A method for modifying glassy surfaces including: producing nanoparticles; depositing the said nanoparticles on a surface; providing energy to the particles and/or surface so that the nanoparticles are at least partly diffused/dissolved into the glassy surface; and reducing the cohesive energy of the nanoparticles during the production of the nanoparticles or after the production of the nanoparticles. | 04-23-2009 |
| 20090095021 | HYDROPHOBIC GLASS SURFACE - The invention relates to a method of forming a hydrophobic surface for glass or glazing. The method comprises producing particles having an average aerodynamic particle size of less than 200 nm and guiding the particles further onto the glass surface. The particles to be produced according to the invention are hydrophobic particles and the particles are guided onto the glass surface so that they at least partly dissolve and/or diffuse into the glass surface. | 04-16-2009 |
| 20090078203 | HOT SOURCE - A hot source for vapour deposition apparatuses for supplying source substance into a reactor, the source comprising a source container having a source space for the source substance. The source further comprises a lid comprising first heating means for heating the lid, the lid being detachably installable in the source container in such a way that the heat generated by the first heating means is transmitted by conduction to the source container and further to the source space to heat the source substance. | 03-26-2009 |
| 20090031947 | Reactor - A reactor for an atomic layer deposition (ALD) method, the reactor comprising a vacuum chamber which has a first end wall provided with a loading hatch, a second end wall provided with a rear flange, side walls/casing connecting the first and the second end walls, and at least one source material fitting for feeding source materials into the vacuum chamber of the reactors. According to the invention, at least one of the source material fittings is provided in the side wall/casing of the vacuum of the reactor. | 02-05-2009 |
| 20090004386 | Protective Coating of Silver - In the method, silver is protected against tarnishing using an Atomic Layer Deposition method. In the Atomic Layer Deposition method, a thin film coating is formed 5 on the surface of silver by depositing successive molecule layers of the coating material. For example aluminium oxide (Al 2O3) or zirconium oxide may be used as the coating material. | 01-01-2009 |