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Avago Technologies Wireless IP(Singapore) Pte. Ltd
| Avago Technologies Wireless IP(Singapore) Pte. Ltd Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20090224180 | Apparatus and method for processing a wafer - An method for processing a processing surface of a wafer by means of a processing-beam is disclosed. The method comprises moving the wafer and the processing-beam relative to each other so that the processing-beam scans the processing surface of the wafer in a scanning path having a curved course with continuously or stepwise changing radiuses. An apparatus is also disclosed. | 09-10-2009 |