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AURION ANLAGENTECHNIK GMBH
| AURION ANLAGENTECHNIK GMBH Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20110006687 | METHOD AND GENERATOR CIRCUIT FOR PRODUCTION OF PLASMA BY MEANS OF RADIO-FREQUENCY EXCITATION - Method and generator circuit for generating plasmas by means of radiofrequency excitation | 01-13-2011 |