ASML HOLDINGS N.V.
Veldhoven, NL
ASML HOLDINGS N.V. Patent applications | ||
Patent application number | Title | Published |
---|---|---|
20130108203 | Pneumatic Bearing with Bonded Polymer Film Wear Surface and Production Method thereof | 05-02-2013 |
20120281197 | Holographic Mask Inspection System with Spatial Filter - Disclosed are apparatuses, methods, and lithographic systems for holographic mask inspection. A holographic mask inspection system ( | 11-08-2012 |