| 20090283155 | Fluid control system - The fluid control system according to the present invention is characterized by being provided with a fluid control valve controlling a pressure of a fluid by a pressure operation of a control fluid, a flow rate measuring device measuring a flow rate of the fluid, converting a measurement value of said flow rate to an electrical signal, and outputting it, and a control part outputting a command signal for controlling an opening area of said fluid control valve to said fluid control valve or equipment operating said fluid control valve based on a difference of said electrical signal from said flow rate measuring device and a set flow rate. | 11-19-2009 |
