| 20110000619 | ROTATIONAL ANTENNA AND SEMICONDUCTOR DEVICE INCLUDING THE SAME - A rotational antenna and a semiconductor manufacturing device provided with the same are disclosed. The rotational antenna includes a plurality of coils connected in parallel to a high frequency power source and arranged at a regular interval around an axis in a symmetrical relationship with respect to the axis, wherein an electromagnetic field for generating inductively coupled plasma is uniformly formed when the coils are rotated about the axis. | 01-06-2011 |
