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AIXTRON INC.

AIXTRON INC. Patent applications
Patent application numberTitlePublished
20090283040DEVICE FOR TEMPERATURE-CONTROLLED ACCOMMODATION OF A CONTAINER - The invention relates to a device for the tempered storage of a container (11-19-2009
20090110805Apparatus and Method for Controlling the Surface Temperature of a Substrate in a Process Chamber - The invention relates to a method of controlling the surface temperature of a substrate (04-30-2009
20080206464Method and Device for the Depositing of Gallium Nitrite Layers on a Sapphire Substrate and Associated Substrate Holder - The invention relates to a device for holding at least one substrate (08-28-2008