| AGC Electronic Materials Patent applications |
| Patent application number | Title | Published |
|---|
| 20110274874 | CHEMICAL VAPOR DEPOSITED SILICON CARBIDE ARTICLES - Chemical vapor deposited silicon carbide articles and the methods of making them are disclosed. The chemical vapor deposited silicon carbide articles are composed of multiple parts which are joined together by sintered ceramic joints. The joints strengthen and maintain tolerances at the joints of the articles. The articles may be used in semi-conductor processing. | 11-10-2011 |
| 20080226868 | Chemical vapor deposited silicon carbide articles - Chemical vapor deposited silicon carbide articles and the methods of making them are disclosed. The chemical vapor deposited silicon carbide articles are composed of multiple parts which are joined together by sintered ceramics joints. The joints strengthen and maintain tolerances at the joints of the articles. The articles may be used in semi-conductor processing. | 09-18-2008 |
