Inventors list |
Assignees list |
Classification tree browser |
Top 100 Inventors |
Top 100 Assignees |
Advanced Technology Marterials, Inc.
| Advanced Technology Marterials, Inc. Patent applications | ||
| Patent application number | Title | Published |
|---|---|---|
| 20090217940 | REMOVAL OF PARTICLE CONTAMINATION ON PATTERNED SILICON/SILICON DIOXIDE USING DENSE FLUID/CHEMICAL FORMULATIONS - A cleaning composition for cleaning particulate contamination from small dimensions on microelectronic device substrates. The cleaning composition contains dense CO | 09-03-2009 |