| 20090303496 | METHOD AND APPARATUS FOR REDUCING PROBE WAVELENGTH IN LASER EXCITED SURFACE ACOUSTIC WAVE SPECTROSCOPY - The penetration depth of surface acoustic wave scales with wavelength. To measure thinner films using impulse stimulated thermal scattering (ISTS) it is advantageous to reduce the measurement wavelength to on the order of 1 micron. One way to reduce the measurement wavelength is to employ a high numerical aperture lens to converge an excitation and probe laser beam in an optical system at wider angles. While doing this, the increased optical/mechanical tolerances can be reduced by fine-tuning the phase between an excitation laser pattern and a probe laser pattern by adjusting either a neutral-density filter or matching plate for a particular wavelength. Blocking unwanted diffraction order beams generated by the optical system with a specialized design beam block plate is needed to retain the long wavelength capability. | 12-10-2009 |
